2/5/2013	10:33:38 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/5/2013	10:33:38 AM	Recipe started at 10:33 AM
2/5/2013	10:33:38 AM	Helium valve closed
2/5/2013	10:33:38 AM	H2 valve closed
2/5/2013	10:33:38 AM	BCl3 valve closed
2/5/2013	10:33:38 AM	PH3 valve closed
2/5/2013	10:33:38 AM	SiCl4 pre valve closed
2/5/2013	10:33:38 AM	SiCl4 post valve closed
2/5/2013	10:33:38 AM	Main Vac valve closed
2/5/2013	10:33:38 AM	Bypass valve closed
2/5/2013	10:33:38 AM	Bubbler valve closed
2/5/2013	10:33:38 AM	Helium MFC set to  0.000000
2/5/2013	10:33:38 AM	H2 MFC set to  0.000000
2/5/2013	10:33:38 AM	BCl3 MFC set to  0.000000
2/5/2013	10:33:38 AM	PH3 MFC set to  0.000000
2/5/2013	10:33:38 AM	SiCl4 MFC set to  0.000000
2/5/2013	10:33:38 AM	Bypass solenoid MFC set to  0.000000
2/5/2013	10:33:39 AM	Tube furnace set to 0
2/5/2013	10:33:42 AM	H2 valve closed
2/5/2013	10:33:42 AM	BCl3 valve closed
2/5/2013	10:33:42 AM	PH3 valve closed
2/5/2013	10:33:42 AM	SiCl4 pre valve closed
2/5/2013	10:33:42 AM	SiCl4 post valve closed
2/5/2013	10:33:42 AM	Main Vac valve closed
2/5/2013	10:33:42 AM	Bypass valve closed
2/5/2013	10:33:42 AM	Bubbler valve closed
2/5/2013	10:33:42 AM	Helium valve opened
2/5/2013	10:33:42 AM	Helium MFC set to  500.000000
2/5/2013	10:33:42 AM	H2 MFC set to  0.000000
2/5/2013	10:33:42 AM	BCl3 MFC set to  0.000000
2/5/2013	10:33:42 AM	PH3 MFC set to  0.000000
2/5/2013	10:33:42 AM	SiCl4 MFC set to  0.000000
2/5/2013	10:33:42 AM	Bypass solenoid MFC set to  0.000000
2/5/2013	10:33:42 AM	Tube furnace set to 0
2/5/2013	10:34:54 AM	Helium valve closed
2/5/2013	10:34:54 AM	H2 valve closed
2/5/2013	10:34:54 AM	BCl3 valve closed
2/5/2013	10:34:54 AM	PH3 valve closed
2/5/2013	10:34:54 AM	SiCl4 pre valve closed
2/5/2013	10:34:54 AM	SiCl4 post valve closed
2/5/2013	10:34:54 AM	Main Vac valve closed
2/5/2013	10:34:54 AM	Bypass valve closed
2/5/2013	10:34:54 AM	Bubbler valve closed
2/5/2013	10:34:54 AM	Helium MFC set to  0.000000
2/5/2013	10:34:54 AM	H2 MFC set to  0.000000
2/5/2013	10:34:54 AM	BCl3 MFC set to  0.000000
2/5/2013	10:34:54 AM	PH3 MFC set to  0.000000
2/5/2013	10:34:54 AM	SiCl4 MFC set to  0.000000
2/5/2013	10:34:54 AM	Bypass solenoid MFC set to  0.000000
2/5/2013	10:34:55 AM	Tube furnace set to 0
2/5/2013	10:34:56 AM	Run finished at 10:34 AM
2/5/2013	10:34:56 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/5/2013	10:37:34 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/5/2013	10:37:35 AM	Recipe started at 10:37 AM
2/5/2013	10:37:35 AM	Helium valve closed
2/5/2013	10:37:35 AM	H2 valve closed
2/5/2013	10:37:35 AM	BCl3 valve closed
2/5/2013	10:37:35 AM	PH3 valve closed
2/5/2013	10:37:35 AM	SiCl4 pre valve closed
2/5/2013	10:37:35 AM	SiCl4 post valve closed
2/5/2013	10:37:35 AM	Main Vac valve closed
2/5/2013	10:37:35 AM	Bubbler valve closed
2/5/2013	10:37:35 AM	Bypass valve opened
2/5/2013	10:37:35 AM	Helium MFC set to  0.000000
2/5/2013	10:37:35 AM	H2 MFC set to  0.000000
2/5/2013	10:37:35 AM	BCl3 MFC set to  0.000000
2/5/2013	10:37:35 AM	PH3 MFC set to  0.000000
2/5/2013	10:37:35 AM	SiCl4 MFC set to  0.000000
2/5/2013	10:37:35 AM	Bypass solenoid MFC set to  0.000000
2/5/2013	10:37:35 AM	Tube furnace set to 0
2/5/2013	10:38:44 AM	Helium valve closed
2/5/2013	10:38:44 AM	H2 valve closed
2/5/2013	10:38:44 AM	BCl3 valve closed
2/5/2013	10:38:44 AM	PH3 valve closed
2/5/2013	10:38:44 AM	SiCl4 pre valve closed
2/5/2013	10:38:44 AM	SiCl4 post valve closed
2/5/2013	10:38:44 AM	Main Vac valve closed
2/5/2013	10:38:44 AM	Bubbler valve closed
2/5/2013	10:38:44 AM	Bypass valve opened
2/5/2013	10:38:44 AM	Helium MFC set to  0.000000
2/5/2013	10:38:44 AM	H2 MFC set to  0.000000
2/5/2013	10:38:44 AM	BCl3 MFC set to  0.000000
2/5/2013	10:38:44 AM	PH3 MFC set to  0.000000
2/5/2013	10:38:44 AM	SiCl4 MFC set to  0.000000
2/5/2013	10:38:44 AM	Bypass solenoid MFC set to  0.000000
2/5/2013	10:38:45 AM	Tube furnace set to 0
2/5/2013	10:39:45 AM	Helium valve closed
2/5/2013	10:39:45 AM	H2 valve closed
2/5/2013	10:39:45 AM	BCl3 valve closed
2/5/2013	10:39:45 AM	PH3 valve closed
2/5/2013	10:39:45 AM	SiCl4 pre valve closed
2/5/2013	10:39:45 AM	SiCl4 post valve closed
2/5/2013	10:39:45 AM	Bypass valve closed
2/5/2013	10:39:45 AM	Bubbler valve closed
2/5/2013	10:39:45 AM	Main Vac valve opened
2/5/2013	10:39:45 AM	Helium MFC set to  0.000000
2/5/2013	10:39:45 AM	H2 MFC set to  0.000000
2/5/2013	10:39:45 AM	BCl3 MFC set to  0.000000
2/5/2013	10:39:45 AM	PH3 MFC set to  0.000000
2/5/2013	10:39:45 AM	SiCl4 MFC set to  0.000000
2/5/2013	10:39:45 AM	Bypass solenoid MFC set to  0.000000
2/5/2013	10:39:45 AM	Tube furnace set to 0
2/5/2013	10:39:46 AM	Run finished at 10:39 AM
2/5/2013	10:39:46 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/5/2013	10:46:31 AM	Recipe started at 10:46 AM
2/5/2013	10:46:31 AM	Helium valve closed
2/5/2013	10:46:31 AM	BCl3 valve closed
2/5/2013	10:46:31 AM	PH3 valve closed
2/5/2013	10:46:31 AM	SiCl4 pre valve closed
2/5/2013	10:46:31 AM	SiCl4 post valve closed
2/5/2013	10:46:31 AM	Bypass valve closed
2/5/2013	10:46:31 AM	Bubbler valve closed
2/5/2013	10:46:31 AM	H2 valve opened
2/5/2013	10:46:31 AM	Main Vac valve opened
2/5/2013	10:46:31 AM	Helium MFC set to  0.000000
2/5/2013	10:46:31 AM	H2 MFC set to  0.000000
2/5/2013	10:46:31 AM	BCl3 MFC set to  0.000000
2/5/2013	10:46:31 AM	PH3 MFC set to  0.000000
2/5/2013	10:46:31 AM	SiCl4 MFC set to  0.000000
2/5/2013	10:46:31 AM	Bypass solenoid MFC set to  0.000000
2/5/2013	10:46:31 AM	Tube furnace set to 150
2/5/2013	10:47:01 AM	H2 valve closed
2/5/2013	10:47:01 AM	BCl3 valve closed
2/5/2013	10:47:01 AM	PH3 valve closed
2/5/2013	10:47:01 AM	SiCl4 pre valve closed
2/5/2013	10:47:01 AM	SiCl4 post valve closed
2/5/2013	10:47:01 AM	Bypass valve closed
2/5/2013	10:47:01 AM	Bubbler valve closed
2/5/2013	10:47:01 AM	Helium valve opened
2/5/2013	10:47:01 AM	Main Vac valve opened
2/5/2013	10:47:01 AM	Helium MFC set to  20.000000
2/5/2013	10:47:01 AM	H2 MFC set to  0.000000
2/5/2013	10:47:01 AM	BCl3 MFC set to  0.000000
2/5/2013	10:47:01 AM	PH3 MFC set to  0.000000
2/5/2013	10:47:01 AM	SiCl4 MFC set to  0.000000
2/5/2013	10:47:01 AM	Bypass solenoid MFC set to  0.000000
2/5/2013	10:47:02 AM	Tube furnace set to 150
2/5/2013	10:47:32 AM	Helium valve closed
2/5/2013	10:47:32 AM	H2 valve closed
2/5/2013	10:47:32 AM	BCl3 valve closed
2/5/2013	10:47:32 AM	PH3 valve closed
2/5/2013	10:47:32 AM	SiCl4 pre valve closed
2/5/2013	10:47:32 AM	SiCl4 post valve closed
2/5/2013	10:47:32 AM	Bypass valve closed
2/5/2013	10:47:32 AM	Bubbler valve closed
2/5/2013	10:47:32 AM	Main Vac valve opened
2/5/2013	10:47:32 AM	Helium MFC set to  0.000000
2/5/2013	10:47:32 AM	H2 MFC set to  0.000000
2/5/2013	10:47:32 AM	BCl3 MFC set to  0.000000
2/5/2013	10:47:32 AM	PH3 MFC set to  0.000000
2/5/2013	10:47:32 AM	SiCl4 MFC set to  0.000000
2/5/2013	10:47:32 AM	Bypass solenoid MFC set to  0.000000
2/5/2013	10:47:32 AM	Tube furnace set to 150
2/5/2013	10:48:02 AM	H2 valve closed
2/5/2013	10:48:02 AM	BCl3 valve closed
2/5/2013	10:48:02 AM	PH3 valve closed
2/5/2013	10:48:02 AM	SiCl4 pre valve closed
2/5/2013	10:48:02 AM	SiCl4 post valve closed
2/5/2013	10:48:02 AM	Bypass valve closed
2/5/2013	10:48:02 AM	Bubbler valve closed
2/5/2013	10:48:02 AM	Helium valve opened
2/5/2013	10:48:02 AM	Main Vac valve opened
2/5/2013	10:48:02 AM	Helium MFC set to  20.000000
2/5/2013	10:48:02 AM	H2 MFC set to  0.000000
2/5/2013	10:48:02 AM	BCl3 MFC set to  0.000000
2/5/2013	10:48:02 AM	PH3 MFC set to  0.000000
2/5/2013	10:48:02 AM	SiCl4 MFC set to  0.000000
2/5/2013	10:48:02 AM	Bypass solenoid MFC set to  0.000000
2/5/2013	10:48:02 AM	Tube furnace set to 150
2/5/2013	10:48:32 AM	Helium valve closed
2/5/2013	10:48:32 AM	H2 valve closed
2/5/2013	10:48:32 AM	BCl3 valve closed
2/5/2013	10:48:32 AM	PH3 valve closed
2/5/2013	10:48:32 AM	SiCl4 pre valve closed
2/5/2013	10:48:32 AM	SiCl4 post valve closed
2/5/2013	10:48:32 AM	Bypass valve closed
2/5/2013	10:48:32 AM	Bubbler valve closed
2/5/2013	10:48:32 AM	Main Vac valve opened
2/5/2013	10:48:32 AM	Helium MFC set to  0.000000
2/5/2013	10:48:32 AM	H2 MFC set to  0.000000
2/5/2013	10:48:32 AM	BCl3 MFC set to  0.000000
2/5/2013	10:48:32 AM	PH3 MFC set to  0.000000
2/5/2013	10:48:32 AM	SiCl4 MFC set to  0.000000
2/5/2013	10:48:32 AM	Bypass solenoid MFC set to  0.000000
2/5/2013	10:48:32 AM	Tube furnace set to 150
2/5/2013	10:49:02 AM	H2 valve closed
2/5/2013	10:49:02 AM	BCl3 valve closed
2/5/2013	10:49:02 AM	PH3 valve closed
2/5/2013	10:49:02 AM	SiCl4 pre valve closed
2/5/2013	10:49:02 AM	SiCl4 post valve closed
2/5/2013	10:49:02 AM	Bypass valve closed
2/5/2013	10:49:02 AM	Bubbler valve closed
2/5/2013	10:49:02 AM	Helium valve opened
2/5/2013	10:49:02 AM	Main Vac valve opened
2/5/2013	10:49:02 AM	Helium MFC set to  20.000000
2/5/2013	10:49:02 AM	H2 MFC set to  0.000000
2/5/2013	10:49:02 AM	BCl3 MFC set to  0.000000
2/5/2013	10:49:02 AM	PH3 MFC set to  0.000000
2/5/2013	10:49:02 AM	SiCl4 MFC set to  0.000000
2/5/2013	10:49:02 AM	Bypass solenoid MFC set to  0.000000
2/5/2013	10:49:03 AM	Tube furnace set to 150
2/5/2013	10:51:03 AM	Helium valve closed
2/5/2013	10:51:03 AM	H2 valve closed
2/5/2013	10:51:03 AM	BCl3 valve closed
2/5/2013	10:51:03 AM	PH3 valve closed
2/5/2013	10:51:03 AM	SiCl4 pre valve closed
2/5/2013	10:51:03 AM	SiCl4 post valve closed
2/5/2013	10:51:03 AM	Bypass valve closed
2/5/2013	10:51:03 AM	Bubbler valve closed
2/5/2013	10:51:03 AM	Main Vac valve opened
2/5/2013	10:51:03 AM	Helium MFC set to  0.000000
2/5/2013	10:51:03 AM	H2 MFC set to  0.000000
2/5/2013	10:51:03 AM	BCl3 MFC set to  0.000000
2/5/2013	10:51:03 AM	PH3 MFC set to  0.000000
2/5/2013	10:51:03 AM	SiCl4 MFC set to  0.000000
2/5/2013	10:51:03 AM	Bypass solenoid MFC set to  0.000000
2/5/2013	10:51:03 AM	Tube furnace set to 150
2/5/2013	10:51:33 AM	H2 valve closed
2/5/2013	10:51:33 AM	BCl3 valve closed
2/5/2013	10:51:33 AM	PH3 valve closed
2/5/2013	10:51:33 AM	SiCl4 pre valve closed
2/5/2013	10:51:33 AM	SiCl4 post valve closed
2/5/2013	10:51:33 AM	Bypass valve closed
2/5/2013	10:51:33 AM	Bubbler valve closed
2/5/2013	10:51:33 AM	Helium valve opened
2/5/2013	10:51:33 AM	Main Vac valve opened
2/5/2013	10:51:33 AM	Helium MFC set to  20.000000
2/5/2013	10:51:33 AM	H2 MFC set to  0.000000
2/5/2013	10:51:33 AM	BCl3 MFC set to  0.000000
2/5/2013	10:51:33 AM	PH3 MFC set to  0.000000
2/5/2013	10:51:33 AM	SiCl4 MFC set to  0.000000
2/5/2013	10:51:33 AM	Bypass solenoid MFC set to  0.000000
2/5/2013	10:51:33 AM	Tube furnace set to 150
2/5/2013	10:52:03 AM	Helium valve closed
2/5/2013	10:52:03 AM	H2 valve closed
2/5/2013	10:52:03 AM	BCl3 valve closed
2/5/2013	10:52:03 AM	PH3 valve closed
2/5/2013	10:52:03 AM	SiCl4 pre valve closed
2/5/2013	10:52:03 AM	SiCl4 post valve closed
2/5/2013	10:52:03 AM	Bypass valve closed
2/5/2013	10:52:03 AM	Bubbler valve closed
2/5/2013	10:52:03 AM	Main Vac valve opened
2/5/2013	10:52:03 AM	Helium MFC set to  0.000000
2/5/2013	10:52:03 AM	H2 MFC set to  0.000000
2/5/2013	10:52:03 AM	BCl3 MFC set to  0.000000
2/5/2013	10:52:03 AM	PH3 MFC set to  0.000000
2/5/2013	10:52:03 AM	SiCl4 MFC set to  0.000000
2/5/2013	10:52:03 AM	Bypass solenoid MFC set to  0.000000
2/5/2013	10:52:03 AM	Tube furnace set to 150
2/5/2013	10:52:33 AM	H2 valve closed
2/5/2013	10:52:33 AM	BCl3 valve closed
2/5/2013	10:52:33 AM	PH3 valve closed
2/5/2013	10:52:33 AM	SiCl4 pre valve closed
2/5/2013	10:52:33 AM	SiCl4 post valve closed
2/5/2013	10:52:33 AM	Bypass valve closed
2/5/2013	10:52:33 AM	Bubbler valve closed
2/5/2013	10:52:33 AM	Helium valve opened
2/5/2013	10:52:33 AM	Main Vac valve opened
2/5/2013	10:52:33 AM	Helium MFC set to  20.000000
2/5/2013	10:52:33 AM	H2 MFC set to  0.000000
2/5/2013	10:52:33 AM	BCl3 MFC set to  0.000000
2/5/2013	10:52:33 AM	PH3 MFC set to  0.000000
2/5/2013	10:52:33 AM	SiCl4 MFC set to  0.000000
2/5/2013	10:52:33 AM	Bypass solenoid MFC set to  0.000000
2/5/2013	10:52:34 AM	Tube furnace set to 150
2/5/2013	10:53:04 AM	Helium valve closed
2/5/2013	10:53:04 AM	H2 valve closed
2/5/2013	10:53:04 AM	BCl3 valve closed
2/5/2013	10:53:04 AM	PH3 valve closed
2/5/2013	10:53:04 AM	SiCl4 pre valve closed
2/5/2013	10:53:04 AM	SiCl4 post valve closed
2/5/2013	10:53:04 AM	Bypass valve closed
2/5/2013	10:53:04 AM	Bubbler valve closed
2/5/2013	10:53:04 AM	Main Vac valve opened
2/5/2013	10:53:04 AM	Helium MFC set to  0.000000
2/5/2013	10:53:04 AM	H2 MFC set to  0.000000
2/5/2013	10:53:04 AM	BCl3 MFC set to  0.000000
2/5/2013	10:53:04 AM	PH3 MFC set to  0.000000
2/5/2013	10:53:04 AM	SiCl4 MFC set to  0.000000
2/5/2013	10:53:04 AM	Bypass solenoid MFC set to  0.000000
2/5/2013	10:53:04 AM	Tube furnace set to 150
2/5/2013	10:53:34 AM	H2 valve closed
2/5/2013	10:53:34 AM	BCl3 valve closed
2/5/2013	10:53:34 AM	PH3 valve closed
2/5/2013	10:53:34 AM	SiCl4 pre valve closed
2/5/2013	10:53:34 AM	SiCl4 post valve closed
2/5/2013	10:53:34 AM	Bypass valve closed
2/5/2013	10:53:34 AM	Bubbler valve closed
2/5/2013	10:53:34 AM	Helium valve opened
2/5/2013	10:53:34 AM	Main Vac valve opened
2/5/2013	10:53:34 AM	Helium MFC set to  20.000000
2/5/2013	10:53:34 AM	H2 MFC set to  0.000000
2/5/2013	10:53:34 AM	BCl3 MFC set to  0.000000
2/5/2013	10:53:34 AM	PH3 MFC set to  0.000000
2/5/2013	10:53:34 AM	SiCl4 MFC set to  0.000000
2/5/2013	10:53:34 AM	Bypass solenoid MFC set to  0.000000
2/5/2013	10:53:34 AM	Tube furnace set to 150
2/5/2013	10:55:34 AM	Helium valve closed
2/5/2013	10:55:34 AM	H2 valve closed
2/5/2013	10:55:34 AM	BCl3 valve closed
2/5/2013	10:55:34 AM	PH3 valve closed
2/5/2013	10:55:34 AM	SiCl4 pre valve closed
2/5/2013	10:55:34 AM	SiCl4 post valve closed
2/5/2013	10:55:34 AM	Bypass valve closed
2/5/2013	10:55:34 AM	Bubbler valve closed
2/5/2013	10:55:34 AM	Main Vac valve opened
2/5/2013	10:55:34 AM	Helium MFC set to  0.000000
2/5/2013	10:55:34 AM	H2 MFC set to  0.000000
2/5/2013	10:55:34 AM	BCl3 MFC set to  0.000000
2/5/2013	10:55:34 AM	PH3 MFC set to  0.000000
2/5/2013	10:55:34 AM	SiCl4 MFC set to  0.000000
2/5/2013	10:55:34 AM	Bypass solenoid MFC set to  0.000000
2/5/2013	10:55:34 AM	Tube furnace set to 150
2/5/2013	10:56:04 AM	H2 valve closed
2/5/2013	10:56:04 AM	BCl3 valve closed
2/5/2013	10:56:04 AM	PH3 valve closed
2/5/2013	10:56:04 AM	SiCl4 pre valve closed
2/5/2013	10:56:04 AM	SiCl4 post valve closed
2/5/2013	10:56:04 AM	Bypass valve closed
2/5/2013	10:56:04 AM	Bubbler valve closed
2/5/2013	10:56:04 AM	Helium valve opened
2/5/2013	10:56:04 AM	Main Vac valve opened
2/5/2013	10:56:04 AM	Helium MFC set to  20.000000
2/5/2013	10:56:04 AM	H2 MFC set to  0.000000
2/5/2013	10:56:04 AM	BCl3 MFC set to  0.000000
2/5/2013	10:56:04 AM	PH3 MFC set to  0.000000
2/5/2013	10:56:04 AM	SiCl4 MFC set to  0.000000
2/5/2013	10:56:04 AM	Bypass solenoid MFC set to  0.000000
2/5/2013	10:56:05 AM	Tube furnace set to 150
2/5/2013	10:56:35 AM	Helium valve closed
2/5/2013	10:56:35 AM	H2 valve closed
2/5/2013	10:56:35 AM	BCl3 valve closed
2/5/2013	10:56:35 AM	PH3 valve closed
2/5/2013	10:56:35 AM	SiCl4 pre valve closed
2/5/2013	10:56:35 AM	SiCl4 post valve closed
2/5/2013	10:56:35 AM	Bypass valve closed
2/5/2013	10:56:35 AM	Bubbler valve closed
2/5/2013	10:56:35 AM	Main Vac valve opened
2/5/2013	10:56:35 AM	Helium MFC set to  0.000000
2/5/2013	10:56:35 AM	H2 MFC set to  0.000000
2/5/2013	10:56:35 AM	BCl3 MFC set to  0.000000
2/5/2013	10:56:35 AM	PH3 MFC set to  0.000000
2/5/2013	10:56:35 AM	SiCl4 MFC set to  0.000000
2/5/2013	10:56:35 AM	Bypass solenoid MFC set to  0.000000
2/5/2013	10:56:35 AM	Tube furnace set to 150
2/5/2013	10:57:05 AM	H2 valve closed
2/5/2013	10:57:05 AM	BCl3 valve closed
2/5/2013	10:57:05 AM	PH3 valve closed
2/5/2013	10:57:05 AM	SiCl4 pre valve closed
2/5/2013	10:57:05 AM	SiCl4 post valve closed
2/5/2013	10:57:05 AM	Bypass valve closed
2/5/2013	10:57:05 AM	Bubbler valve closed
2/5/2013	10:57:05 AM	Helium valve opened
2/5/2013	10:57:05 AM	Main Vac valve opened
2/5/2013	10:57:05 AM	Helium MFC set to  20.000000
2/5/2013	10:57:05 AM	H2 MFC set to  0.000000
2/5/2013	10:57:05 AM	BCl3 MFC set to  0.000000
2/5/2013	10:57:05 AM	PH3 MFC set to  0.000000
2/5/2013	10:57:05 AM	SiCl4 MFC set to  0.000000
2/5/2013	10:57:05 AM	Bypass solenoid MFC set to  0.000000
2/5/2013	10:57:05 AM	Tube furnace set to 150
2/5/2013	10:59:05 AM	Helium valve closed
2/5/2013	10:59:05 AM	H2 valve closed
2/5/2013	10:59:05 AM	BCl3 valve closed
2/5/2013	10:59:05 AM	PH3 valve closed
2/5/2013	10:59:05 AM	SiCl4 pre valve closed
2/5/2013	10:59:05 AM	SiCl4 post valve closed
2/5/2013	10:59:05 AM	Bypass valve closed
2/5/2013	10:59:05 AM	Bubbler valve closed
2/5/2013	10:59:05 AM	Main Vac valve opened
2/5/2013	10:59:05 AM	Helium MFC set to  0.000000
2/5/2013	10:59:05 AM	H2 MFC set to  0.000000
2/5/2013	10:59:05 AM	BCl3 MFC set to  0.000000
2/5/2013	10:59:05 AM	PH3 MFC set to  0.000000
2/5/2013	10:59:05 AM	SiCl4 MFC set to  0.000000
2/5/2013	10:59:05 AM	Bypass solenoid MFC set to  0.000000
2/5/2013	10:59:05 AM	Tube furnace set to 150
2/5/2013	10:59:35 AM	H2 valve closed
2/5/2013	10:59:35 AM	BCl3 valve closed
2/5/2013	10:59:35 AM	PH3 valve closed
2/5/2013	10:59:35 AM	SiCl4 pre valve closed
2/5/2013	10:59:35 AM	SiCl4 post valve closed
2/5/2013	10:59:35 AM	Bypass valve closed
2/5/2013	10:59:35 AM	Bubbler valve closed
2/5/2013	10:59:35 AM	Helium valve opened
2/5/2013	10:59:35 AM	Main Vac valve opened
2/5/2013	10:59:35 AM	Helium MFC set to  20.000000
2/5/2013	10:59:35 AM	H2 MFC set to  0.000000
2/5/2013	10:59:35 AM	BCl3 MFC set to  0.000000
2/5/2013	10:59:35 AM	PH3 MFC set to  0.000000
2/5/2013	10:59:35 AM	SiCl4 MFC set to  0.000000
2/5/2013	10:59:35 AM	Bypass solenoid MFC set to  0.000000
2/5/2013	10:59:35 AM	Tube furnace set to 150
2/5/2013	11:00:06 AM	Helium valve closed
2/5/2013	11:00:06 AM	H2 valve closed
2/5/2013	11:00:06 AM	BCl3 valve closed
2/5/2013	11:00:06 AM	PH3 valve closed
2/5/2013	11:00:06 AM	SiCl4 pre valve closed
2/5/2013	11:00:06 AM	SiCl4 post valve closed
2/5/2013	11:00:06 AM	Bypass valve closed
2/5/2013	11:00:06 AM	Bubbler valve closed
2/5/2013	11:00:06 AM	Main Vac valve opened
2/5/2013	11:00:06 AM	Helium MFC set to  0.000000
2/5/2013	11:00:06 AM	H2 MFC set to  0.000000
2/5/2013	11:00:06 AM	BCl3 MFC set to  0.000000
2/5/2013	11:00:06 AM	PH3 MFC set to  0.000000
2/5/2013	11:00:06 AM	SiCl4 MFC set to  0.000000
2/5/2013	11:00:06 AM	Bypass solenoid MFC set to  0.000000
2/5/2013	11:00:06 AM	Tube furnace set to 150
2/5/2013	11:00:36 AM	H2 valve closed
2/5/2013	11:00:36 AM	BCl3 valve closed
2/5/2013	11:00:36 AM	PH3 valve closed
2/5/2013	11:00:36 AM	SiCl4 pre valve closed
2/5/2013	11:00:36 AM	SiCl4 post valve closed
2/5/2013	11:00:36 AM	Bypass valve closed
2/5/2013	11:00:36 AM	Bubbler valve closed
2/5/2013	11:00:36 AM	Helium valve opened
2/5/2013	11:00:36 AM	Main Vac valve opened
2/5/2013	11:00:36 AM	Helium MFC set to  20.000000
2/5/2013	11:00:36 AM	H2 MFC set to  0.000000
2/5/2013	11:00:36 AM	BCl3 MFC set to  0.000000
2/5/2013	11:00:36 AM	PH3 MFC set to  0.000000
2/5/2013	11:00:36 AM	SiCl4 MFC set to  0.000000
2/5/2013	11:00:36 AM	Bypass solenoid MFC set to  0.000000
2/5/2013	11:00:36 AM	Tube furnace set to 150
2/5/2013	11:02:36 AM	Helium valve closed
2/5/2013	11:02:36 AM	H2 valve closed
2/5/2013	11:02:36 AM	BCl3 valve closed
2/5/2013	11:02:36 AM	PH3 valve closed
2/5/2013	11:02:36 AM	SiCl4 pre valve closed
2/5/2013	11:02:36 AM	SiCl4 post valve closed
2/5/2013	11:02:36 AM	Bypass valve closed
2/5/2013	11:02:36 AM	Bubbler valve closed
2/5/2013	11:02:36 AM	Main Vac valve opened
2/5/2013	11:02:36 AM	Helium MFC set to  0.000000
2/5/2013	11:02:36 AM	H2 MFC set to  0.000000
2/5/2013	11:02:36 AM	BCl3 MFC set to  0.000000
2/5/2013	11:02:36 AM	PH3 MFC set to  0.000000
2/5/2013	11:02:36 AM	SiCl4 MFC set to  0.000000
2/5/2013	11:02:36 AM	Bypass solenoid MFC set to  0.000000
2/5/2013	11:02:36 AM	Tube furnace set to 150
2/5/2013	11:02:37 AM	Run finished at 11:02 AM
2/5/2013	11:29:25 AM	Main Vac valve closed
2/5/2013	11:29:38 AM	Main Vac valve opened
2/5/2013	11:30:51 AM	Recipe started at 11:30 AM
2/5/2013	11:30:51 AM	Helium valve closed
2/5/2013	11:30:51 AM	BCl3 valve closed
2/5/2013	11:30:51 AM	PH3 valve closed
2/5/2013	11:30:51 AM	SiCl4 pre valve closed
2/5/2013	11:30:51 AM	SiCl4 post valve closed
2/5/2013	11:30:51 AM	Bypass valve closed
2/5/2013	11:30:51 AM	Bubbler valve closed
2/5/2013	11:30:51 AM	H2 valve opened
2/5/2013	11:30:51 AM	Main Vac valve opened
2/5/2013	11:30:51 AM	Helium MFC set to  0.000000
2/5/2013	11:30:51 AM	H2 MFC set to  0.000000
2/5/2013	11:30:51 AM	BCl3 MFC set to  0.000000
2/5/2013	11:30:51 AM	PH3 MFC set to  0.000000
2/5/2013	11:30:51 AM	SiCl4 MFC set to  0.000000
2/5/2013	11:30:51 AM	Bypass solenoid MFC set to  0.000000
2/5/2013	11:30:51 AM	Tube furnace set to 150
2/5/2013	11:31:21 AM	H2 valve closed
2/5/2013	11:31:21 AM	BCl3 valve closed
2/5/2013	11:31:21 AM	PH3 valve closed
2/5/2013	11:31:21 AM	SiCl4 pre valve closed
2/5/2013	11:31:21 AM	SiCl4 post valve closed
2/5/2013	11:31:21 AM	Bypass valve closed
2/5/2013	11:31:21 AM	Bubbler valve closed
2/5/2013	11:31:21 AM	Helium valve opened
2/5/2013	11:31:21 AM	Main Vac valve opened
2/5/2013	11:31:21 AM	Helium MFC set to  20.000000
2/5/2013	11:31:21 AM	H2 MFC set to  0.000000
2/5/2013	11:31:21 AM	BCl3 MFC set to  0.000000
2/5/2013	11:31:21 AM	PH3 MFC set to  0.000000
2/5/2013	11:31:21 AM	SiCl4 MFC set to  0.000000
2/5/2013	11:31:21 AM	Bypass solenoid MFC set to  0.000000
2/5/2013	11:31:21 AM	Tube furnace set to 150
2/5/2013	11:31:51 AM	Helium valve closed
2/5/2013	11:31:51 AM	H2 valve closed
2/5/2013	11:31:51 AM	BCl3 valve closed
2/5/2013	11:31:51 AM	PH3 valve closed
2/5/2013	11:31:51 AM	SiCl4 pre valve closed
2/5/2013	11:31:51 AM	SiCl4 post valve closed
2/5/2013	11:31:51 AM	Bypass valve closed
2/5/2013	11:31:51 AM	Bubbler valve closed
2/5/2013	11:31:51 AM	Main Vac valve opened
2/5/2013	11:31:51 AM	Helium MFC set to  0.000000
2/5/2013	11:31:51 AM	H2 MFC set to  0.000000
2/5/2013	11:31:51 AM	BCl3 MFC set to  0.000000
2/5/2013	11:31:51 AM	PH3 MFC set to  0.000000
2/5/2013	11:31:51 AM	SiCl4 MFC set to  0.000000
2/5/2013	11:31:51 AM	Bypass solenoid MFC set to  0.000000
2/5/2013	11:31:51 AM	Tube furnace set to 150
2/5/2013	11:32:21 AM	H2 valve closed
2/5/2013	11:32:21 AM	BCl3 valve closed
2/5/2013	11:32:21 AM	PH3 valve closed
2/5/2013	11:32:21 AM	SiCl4 pre valve closed
2/5/2013	11:32:21 AM	SiCl4 post valve closed
2/5/2013	11:32:21 AM	Bypass valve closed
2/5/2013	11:32:21 AM	Bubbler valve closed
2/5/2013	11:32:21 AM	Helium valve opened
2/5/2013	11:32:21 AM	Main Vac valve opened
2/5/2013	11:32:21 AM	Helium MFC set to  20.000000
2/5/2013	11:32:21 AM	H2 MFC set to  0.000000
2/5/2013	11:32:21 AM	BCl3 MFC set to  0.000000
2/5/2013	11:32:21 AM	PH3 MFC set to  0.000000
2/5/2013	11:32:21 AM	SiCl4 MFC set to  0.000000
2/5/2013	11:32:21 AM	Bypass solenoid MFC set to  0.000000
2/5/2013	11:32:22 AM	Tube furnace set to 150
2/5/2013	11:32:52 AM	Helium valve closed
2/5/2013	11:32:52 AM	H2 valve closed
2/5/2013	11:32:52 AM	BCl3 valve closed
2/5/2013	11:32:52 AM	PH3 valve closed
2/5/2013	11:32:52 AM	SiCl4 pre valve closed
2/5/2013	11:32:52 AM	SiCl4 post valve closed
2/5/2013	11:32:52 AM	Bypass valve closed
2/5/2013	11:32:52 AM	Bubbler valve closed
2/5/2013	11:32:52 AM	Main Vac valve opened
2/5/2013	11:32:52 AM	Helium MFC set to  0.000000
2/5/2013	11:32:52 AM	H2 MFC set to  0.000000
2/5/2013	11:32:52 AM	BCl3 MFC set to  0.000000
2/5/2013	11:32:52 AM	PH3 MFC set to  0.000000
2/5/2013	11:32:52 AM	SiCl4 MFC set to  0.000000
2/5/2013	11:32:52 AM	Bypass solenoid MFC set to  0.000000
2/5/2013	11:32:52 AM	Tube furnace set to 150
2/5/2013	11:33:22 AM	H2 valve closed
2/5/2013	11:33:22 AM	BCl3 valve closed
2/5/2013	11:33:22 AM	PH3 valve closed
2/5/2013	11:33:22 AM	SiCl4 pre valve closed
2/5/2013	11:33:22 AM	SiCl4 post valve closed
2/5/2013	11:33:22 AM	Bypass valve closed
2/5/2013	11:33:22 AM	Bubbler valve closed
2/5/2013	11:33:22 AM	Helium valve opened
2/5/2013	11:33:22 AM	Main Vac valve opened
2/5/2013	11:33:22 AM	Helium MFC set to  20.000000
2/5/2013	11:33:22 AM	H2 MFC set to  0.000000
2/5/2013	11:33:22 AM	BCl3 MFC set to  0.000000
2/5/2013	11:33:22 AM	PH3 MFC set to  0.000000
2/5/2013	11:33:22 AM	SiCl4 MFC set to  0.000000
2/5/2013	11:33:22 AM	Bypass solenoid MFC set to  0.000000
2/5/2013	11:33:22 AM	Tube furnace set to 150
2/5/2013	11:35:22 AM	Helium valve closed
2/5/2013	11:35:22 AM	H2 valve closed
2/5/2013	11:35:22 AM	BCl3 valve closed
2/5/2013	11:35:22 AM	PH3 valve closed
2/5/2013	11:35:22 AM	SiCl4 pre valve closed
2/5/2013	11:35:22 AM	SiCl4 post valve closed
2/5/2013	11:35:22 AM	Bypass valve closed
2/5/2013	11:35:22 AM	Bubbler valve closed
2/5/2013	11:35:22 AM	Main Vac valve opened
2/5/2013	11:35:22 AM	Helium MFC set to  0.000000
2/5/2013	11:35:22 AM	H2 MFC set to  0.000000
2/5/2013	11:35:22 AM	BCl3 MFC set to  0.000000
2/5/2013	11:35:22 AM	PH3 MFC set to  0.000000
2/5/2013	11:35:22 AM	SiCl4 MFC set to  0.000000
2/5/2013	11:35:22 AM	Bypass solenoid MFC set to  0.000000
2/5/2013	11:35:22 AM	Tube furnace set to 150
2/5/2013	11:35:52 AM	H2 valve closed
2/5/2013	11:35:52 AM	BCl3 valve closed
2/5/2013	11:35:52 AM	PH3 valve closed
2/5/2013	11:35:52 AM	SiCl4 pre valve closed
2/5/2013	11:35:52 AM	SiCl4 post valve closed
2/5/2013	11:35:52 AM	Bypass valve closed
2/5/2013	11:35:52 AM	Bubbler valve closed
2/5/2013	11:35:52 AM	Helium valve opened
2/5/2013	11:35:52 AM	Main Vac valve opened
2/5/2013	11:35:52 AM	Helium MFC set to  20.000000
2/5/2013	11:35:52 AM	H2 MFC set to  0.000000
2/5/2013	11:35:52 AM	BCl3 MFC set to  0.000000
2/5/2013	11:35:52 AM	PH3 MFC set to  0.000000
2/5/2013	11:35:52 AM	SiCl4 MFC set to  0.000000
2/5/2013	11:35:52 AM	Bypass solenoid MFC set to  0.000000
2/5/2013	11:35:53 AM	Tube furnace set to 150
2/5/2013	11:36:23 AM	Helium valve closed
2/5/2013	11:36:23 AM	H2 valve closed
2/5/2013	11:36:23 AM	BCl3 valve closed
2/5/2013	11:36:23 AM	PH3 valve closed
2/5/2013	11:36:23 AM	SiCl4 pre valve closed
2/5/2013	11:36:23 AM	SiCl4 post valve closed
2/5/2013	11:36:23 AM	Bypass valve closed
2/5/2013	11:36:23 AM	Bubbler valve closed
2/5/2013	11:36:23 AM	Main Vac valve opened
2/5/2013	11:36:23 AM	Helium MFC set to  0.000000
2/5/2013	11:36:23 AM	H2 MFC set to  0.000000
2/5/2013	11:36:23 AM	BCl3 MFC set to  0.000000
2/5/2013	11:36:23 AM	PH3 MFC set to  0.000000
2/5/2013	11:36:23 AM	SiCl4 MFC set to  0.000000
2/5/2013	11:36:23 AM	Bypass solenoid MFC set to  0.000000
2/5/2013	11:36:23 AM	Tube furnace set to 150
2/5/2013	11:36:53 AM	H2 valve closed
2/5/2013	11:36:53 AM	BCl3 valve closed
2/5/2013	11:36:53 AM	PH3 valve closed
2/5/2013	11:36:53 AM	SiCl4 pre valve closed
2/5/2013	11:36:53 AM	SiCl4 post valve closed
2/5/2013	11:36:53 AM	Bypass valve closed
2/5/2013	11:36:53 AM	Bubbler valve closed
2/5/2013	11:36:53 AM	Helium valve opened
2/5/2013	11:36:53 AM	Main Vac valve opened
2/5/2013	11:36:53 AM	Helium MFC set to  20.000000
2/5/2013	11:36:53 AM	H2 MFC set to  0.000000
2/5/2013	11:36:53 AM	BCl3 MFC set to  0.000000
2/5/2013	11:36:53 AM	PH3 MFC set to  0.000000
2/5/2013	11:36:53 AM	SiCl4 MFC set to  0.000000
2/5/2013	11:36:53 AM	Bypass solenoid MFC set to  0.000000
2/5/2013	11:36:53 AM	Tube furnace set to 150
2/5/2013	11:37:23 AM	Helium valve closed
2/5/2013	11:37:23 AM	H2 valve closed
2/5/2013	11:37:23 AM	BCl3 valve closed
2/5/2013	11:37:23 AM	PH3 valve closed
2/5/2013	11:37:23 AM	SiCl4 pre valve closed
2/5/2013	11:37:23 AM	SiCl4 post valve closed
2/5/2013	11:37:23 AM	Bypass valve closed
2/5/2013	11:37:23 AM	Bubbler valve closed
2/5/2013	11:37:23 AM	Main Vac valve opened
2/5/2013	11:37:23 AM	Helium MFC set to  0.000000
2/5/2013	11:37:23 AM	H2 MFC set to  0.000000
2/5/2013	11:37:23 AM	BCl3 MFC set to  0.000000
2/5/2013	11:37:23 AM	PH3 MFC set to  0.000000
2/5/2013	11:37:23 AM	SiCl4 MFC set to  0.000000
2/5/2013	11:37:23 AM	Bypass solenoid MFC set to  0.000000
2/5/2013	11:37:23 AM	Tube furnace set to 150
2/5/2013	11:37:53 AM	H2 valve closed
2/5/2013	11:37:53 AM	BCl3 valve closed
2/5/2013	11:37:53 AM	PH3 valve closed
2/5/2013	11:37:53 AM	SiCl4 pre valve closed
2/5/2013	11:37:53 AM	SiCl4 post valve closed
2/5/2013	11:37:53 AM	Bypass valve closed
2/5/2013	11:37:53 AM	Bubbler valve closed
2/5/2013	11:37:53 AM	Helium valve opened
2/5/2013	11:37:53 AM	Main Vac valve opened
2/5/2013	11:37:53 AM	Helium MFC set to  20.000000
2/5/2013	11:37:53 AM	H2 MFC set to  0.000000
2/5/2013	11:37:53 AM	BCl3 MFC set to  0.000000
2/5/2013	11:37:53 AM	PH3 MFC set to  0.000000
2/5/2013	11:37:53 AM	SiCl4 MFC set to  0.000000
2/5/2013	11:37:53 AM	Bypass solenoid MFC set to  0.000000
2/5/2013	11:37:54 AM	Tube furnace set to 150
2/5/2013	11:39:54 AM	Helium valve closed
2/5/2013	11:39:54 AM	H2 valve closed
2/5/2013	11:39:54 AM	BCl3 valve closed
2/5/2013	11:39:54 AM	PH3 valve closed
2/5/2013	11:39:54 AM	SiCl4 pre valve closed
2/5/2013	11:39:54 AM	SiCl4 post valve closed
2/5/2013	11:39:54 AM	Bypass valve closed
2/5/2013	11:39:54 AM	Bubbler valve closed
2/5/2013	11:39:54 AM	Main Vac valve opened
2/5/2013	11:39:54 AM	Helium MFC set to  0.000000
2/5/2013	11:39:54 AM	H2 MFC set to  0.000000
2/5/2013	11:39:54 AM	BCl3 MFC set to  0.000000
2/5/2013	11:39:54 AM	PH3 MFC set to  0.000000
2/5/2013	11:39:54 AM	SiCl4 MFC set to  0.000000
2/5/2013	11:39:54 AM	Bypass solenoid MFC set to  0.000000
2/5/2013	11:39:54 AM	Tube furnace set to 150
2/5/2013	11:40:24 AM	H2 valve closed
2/5/2013	11:40:24 AM	BCl3 valve closed
2/5/2013	11:40:24 AM	PH3 valve closed
2/5/2013	11:40:24 AM	SiCl4 pre valve closed
2/5/2013	11:40:24 AM	SiCl4 post valve closed
2/5/2013	11:40:24 AM	Bypass valve closed
2/5/2013	11:40:24 AM	Bubbler valve closed
2/5/2013	11:40:24 AM	Helium valve opened
2/5/2013	11:40:24 AM	Main Vac valve opened
2/5/2013	11:40:24 AM	Helium MFC set to  20.000000
2/5/2013	11:40:24 AM	H2 MFC set to  0.000000
2/5/2013	11:40:24 AM	BCl3 MFC set to  0.000000
2/5/2013	11:40:24 AM	PH3 MFC set to  0.000000
2/5/2013	11:40:24 AM	SiCl4 MFC set to  0.000000
2/5/2013	11:40:24 AM	Bypass solenoid MFC set to  0.000000
2/5/2013	11:40:24 AM	Tube furnace set to 150
2/5/2013	11:40:54 AM	Helium valve closed
2/5/2013	11:40:54 AM	H2 valve closed
2/5/2013	11:40:54 AM	BCl3 valve closed
2/5/2013	11:40:54 AM	PH3 valve closed
2/5/2013	11:40:54 AM	SiCl4 pre valve closed
2/5/2013	11:40:54 AM	SiCl4 post valve closed
2/5/2013	11:40:54 AM	Bypass valve closed
2/5/2013	11:40:54 AM	Bubbler valve closed
2/5/2013	11:40:54 AM	Main Vac valve opened
2/5/2013	11:40:54 AM	Helium MFC set to  0.000000
2/5/2013	11:40:54 AM	H2 MFC set to  0.000000
2/5/2013	11:40:54 AM	BCl3 MFC set to  0.000000
2/5/2013	11:40:54 AM	PH3 MFC set to  0.000000
2/5/2013	11:40:54 AM	SiCl4 MFC set to  0.000000
2/5/2013	11:40:54 AM	Bypass solenoid MFC set to  0.000000
2/5/2013	11:40:54 AM	Tube furnace set to 150
2/5/2013	11:41:24 AM	H2 valve closed
2/5/2013	11:41:24 AM	BCl3 valve closed
2/5/2013	11:41:24 AM	PH3 valve closed
2/5/2013	11:41:24 AM	SiCl4 pre valve closed
2/5/2013	11:41:24 AM	SiCl4 post valve closed
2/5/2013	11:41:24 AM	Bypass valve closed
2/5/2013	11:41:24 AM	Bubbler valve closed
2/5/2013	11:41:24 AM	Helium valve opened
2/5/2013	11:41:24 AM	Main Vac valve opened
2/5/2013	11:41:24 AM	Helium MFC set to  20.000000
2/5/2013	11:41:24 AM	H2 MFC set to  0.000000
2/5/2013	11:41:24 AM	BCl3 MFC set to  0.000000
2/5/2013	11:41:24 AM	PH3 MFC set to  0.000000
2/5/2013	11:41:24 AM	SiCl4 MFC set to  0.000000
2/5/2013	11:41:24 AM	Bypass solenoid MFC set to  0.000000
2/5/2013	11:41:25 AM	Tube furnace set to 150
2/5/2013	11:43:25 AM	Helium valve closed
2/5/2013	11:43:25 AM	H2 valve closed
2/5/2013	11:43:25 AM	BCl3 valve closed
2/5/2013	11:43:25 AM	PH3 valve closed
2/5/2013	11:43:25 AM	SiCl4 pre valve closed
2/5/2013	11:43:25 AM	SiCl4 post valve closed
2/5/2013	11:43:25 AM	Bypass valve closed
2/5/2013	11:43:25 AM	Bubbler valve closed
2/5/2013	11:43:25 AM	Main Vac valve opened
2/5/2013	11:43:25 AM	Helium MFC set to  0.000000
2/5/2013	11:43:25 AM	H2 MFC set to  0.000000
2/5/2013	11:43:25 AM	BCl3 MFC set to  0.000000
2/5/2013	11:43:25 AM	PH3 MFC set to  0.000000
2/5/2013	11:43:25 AM	SiCl4 MFC set to  0.000000
2/5/2013	11:43:25 AM	Bypass solenoid MFC set to  0.000000
2/5/2013	11:43:25 AM	Tube furnace set to 150
2/5/2013	11:43:55 AM	H2 valve closed
2/5/2013	11:43:55 AM	BCl3 valve closed
2/5/2013	11:43:55 AM	PH3 valve closed
2/5/2013	11:43:55 AM	SiCl4 pre valve closed
2/5/2013	11:43:55 AM	SiCl4 post valve closed
2/5/2013	11:43:55 AM	Bypass valve closed
2/5/2013	11:43:55 AM	Bubbler valve closed
2/5/2013	11:43:55 AM	Helium valve opened
2/5/2013	11:43:55 AM	Main Vac valve opened
2/5/2013	11:43:55 AM	Helium MFC set to  20.000000
2/5/2013	11:43:55 AM	H2 MFC set to  0.000000
2/5/2013	11:43:55 AM	BCl3 MFC set to  0.000000
2/5/2013	11:43:55 AM	PH3 MFC set to  0.000000
2/5/2013	11:43:55 AM	SiCl4 MFC set to  0.000000
2/5/2013	11:43:55 AM	Bypass solenoid MFC set to  0.000000
2/5/2013	11:43:55 AM	Tube furnace set to 150
2/5/2013	11:44:25 AM	Helium valve closed
2/5/2013	11:44:25 AM	H2 valve closed
2/5/2013	11:44:25 AM	BCl3 valve closed
2/5/2013	11:44:25 AM	PH3 valve closed
2/5/2013	11:44:25 AM	SiCl4 pre valve closed
2/5/2013	11:44:25 AM	SiCl4 post valve closed
2/5/2013	11:44:25 AM	Bypass valve closed
2/5/2013	11:44:25 AM	Bubbler valve closed
2/5/2013	11:44:25 AM	Main Vac valve opened
2/5/2013	11:44:25 AM	Helium MFC set to  0.000000
2/5/2013	11:44:25 AM	H2 MFC set to  0.000000
2/5/2013	11:44:25 AM	BCl3 MFC set to  0.000000
2/5/2013	11:44:25 AM	PH3 MFC set to  0.000000
2/5/2013	11:44:25 AM	SiCl4 MFC set to  0.000000
2/5/2013	11:44:25 AM	Bypass solenoid MFC set to  0.000000
2/5/2013	11:44:25 AM	Tube furnace set to 150
2/5/2013	11:44:55 AM	H2 valve closed
2/5/2013	11:44:55 AM	BCl3 valve closed
2/5/2013	11:44:55 AM	PH3 valve closed
2/5/2013	11:44:55 AM	SiCl4 pre valve closed
2/5/2013	11:44:55 AM	SiCl4 post valve closed
2/5/2013	11:44:55 AM	Bypass valve closed
2/5/2013	11:44:55 AM	Bubbler valve closed
2/5/2013	11:44:55 AM	Helium valve opened
2/5/2013	11:44:55 AM	Main Vac valve opened
2/5/2013	11:44:55 AM	Helium MFC set to  20.000000
2/5/2013	11:44:55 AM	H2 MFC set to  0.000000
2/5/2013	11:44:55 AM	BCl3 MFC set to  0.000000
2/5/2013	11:44:55 AM	PH3 MFC set to  0.000000
2/5/2013	11:44:55 AM	SiCl4 MFC set to  0.000000
2/5/2013	11:44:55 AM	Bypass solenoid MFC set to  0.000000
2/5/2013	11:44:55 AM	Tube furnace set to 150
2/5/2013	11:46:56 AM	Helium valve closed
2/5/2013	11:46:56 AM	H2 valve closed
2/5/2013	11:46:56 AM	BCl3 valve closed
2/5/2013	11:46:56 AM	PH3 valve closed
2/5/2013	11:46:56 AM	SiCl4 pre valve closed
2/5/2013	11:46:56 AM	SiCl4 post valve closed
2/5/2013	11:46:56 AM	Bypass valve closed
2/5/2013	11:46:56 AM	Bubbler valve closed
2/5/2013	11:46:56 AM	Main Vac valve opened
2/5/2013	11:46:56 AM	Helium MFC set to  0.000000
2/5/2013	11:46:56 AM	H2 MFC set to  0.000000
2/5/2013	11:46:56 AM	BCl3 MFC set to  0.000000
2/5/2013	11:46:56 AM	PH3 MFC set to  0.000000
2/5/2013	11:46:56 AM	SiCl4 MFC set to  0.000000
2/5/2013	11:46:56 AM	Bypass solenoid MFC set to  0.000000
2/5/2013	11:46:56 AM	Tube furnace set to 150
2/5/2013	11:46:57 AM	Run finished at 11:46 AM
2/5/2013	12:07:21 PM	Recipe started at 12:07 PM
2/5/2013	12:07:21 PM	Helium valve closed
2/5/2013	12:07:21 PM	H2 valve closed
2/5/2013	12:07:21 PM	BCl3 valve closed
2/5/2013	12:07:21 PM	PH3 valve closed
2/5/2013	12:07:21 PM	SiCl4 pre valve closed
2/5/2013	12:07:21 PM	SiCl4 post valve closed
2/5/2013	12:07:21 PM	Main Vac valve closed
2/5/2013	12:07:21 PM	Bypass valve closed
2/5/2013	12:07:21 PM	Bubbler valve closed
2/5/2013	12:07:21 PM	Helium MFC set to  0.000000
2/5/2013	12:07:21 PM	H2 MFC set to  0.000000
2/5/2013	12:07:21 PM	BCl3 MFC set to  0.000000
2/5/2013	12:07:21 PM	PH3 MFC set to  0.000000
2/5/2013	12:07:21 PM	SiCl4 MFC set to  0.000000
2/5/2013	12:07:21 PM	Bypass solenoid MFC set to  0.000000
2/5/2013	12:07:21 PM	Tube furnace set to 0
2/5/2013	12:07:24 PM	Helium valve closed
2/5/2013	12:07:24 PM	BCl3 valve closed
2/5/2013	12:07:24 PM	PH3 valve closed
2/5/2013	12:07:24 PM	SiCl4 pre valve closed
2/5/2013	12:07:24 PM	SiCl4 post valve closed
2/5/2013	12:07:24 PM	Main Vac valve closed
2/5/2013	12:07:24 PM	Bypass valve closed
2/5/2013	12:07:24 PM	Bubbler valve closed
2/5/2013	12:07:24 PM	H2 valve opened
2/5/2013	12:07:24 PM	Helium MFC set to  0.000000
2/5/2013	12:07:24 PM	H2 MFC set to  500.000000
2/5/2013	12:07:24 PM	BCl3 MFC set to  0.000000
2/5/2013	12:07:24 PM	PH3 MFC set to  0.000000
2/5/2013	12:07:24 PM	SiCl4 MFC set to  0.000000
2/5/2013	12:07:24 PM	Bypass solenoid MFC set to  0.000000
2/5/2013	12:07:24 PM	Tube furnace set to 0
2/5/2013	12:08:37 PM	Helium valve closed
2/5/2013	12:08:37 PM	BCl3 valve closed
2/5/2013	12:08:37 PM	PH3 valve closed
2/5/2013	12:08:37 PM	SiCl4 pre valve closed
2/5/2013	12:08:37 PM	SiCl4 post valve closed
2/5/2013	12:08:37 PM	Main Vac valve closed
2/5/2013	12:08:37 PM	Bypass valve closed
2/5/2013	12:08:37 PM	H2 valve opened
2/5/2013	12:08:37 PM	Bubbler valve opened
2/5/2013	12:08:37 PM	Helium MFC set to  0.000000
2/5/2013	12:08:37 PM	H2 MFC set to  500.000000
2/5/2013	12:08:37 PM	BCl3 MFC set to  0.000000
2/5/2013	12:08:37 PM	PH3 MFC set to  0.000000
2/5/2013	12:08:37 PM	SiCl4 MFC set to  0.000000
2/5/2013	12:08:37 PM	Bypass solenoid MFC set to  0.000000
2/5/2013	12:08:37 PM	Tube furnace set to 0
2/5/2013	12:08:38 PM	Helium valve closed
2/5/2013	12:08:38 PM	BCl3 valve closed
2/5/2013	12:08:38 PM	PH3 valve closed
2/5/2013	12:08:38 PM	SiCl4 pre valve closed
2/5/2013	12:08:38 PM	SiCl4 post valve closed
2/5/2013	12:08:38 PM	Main Vac valve closed
2/5/2013	12:08:38 PM	Bypass valve closed
2/5/2013	12:08:38 PM	H2 valve opened
2/5/2013	12:08:38 PM	Bubbler valve opened
2/5/2013	12:08:38 PM	Helium MFC set to  0.000000
2/5/2013	12:08:38 PM	H2 MFC set to  500.000000
2/5/2013	12:08:38 PM	BCl3 MFC set to  0.000000
2/5/2013	12:08:38 PM	PH3 MFC set to  0.000000
2/5/2013	12:08:38 PM	SiCl4 MFC set to  0.000000
2/5/2013	12:08:38 PM	Bypass solenoid MFC set to  0.000000
2/5/2013	12:08:38 PM	Tube furnace set to 1000
2/5/2013	12:28:38 PM	Helium valve closed
2/5/2013	12:28:38 PM	PH3 valve closed
2/5/2013	12:28:38 PM	Main Vac valve closed
2/5/2013	12:28:38 PM	Bypass valve closed
2/5/2013	12:28:38 PM	H2 valve opened
2/5/2013	12:28:39 PM	BCl3 valve opened
2/5/2013	12:28:39 PM	SiCl4 pre valve opened
2/5/2013	12:28:39 PM	SiCl4 post valve opened
2/5/2013	12:28:39 PM	Bubbler valve opened
2/5/2013	12:28:39 PM	Helium MFC set to  0.000000
2/5/2013	12:28:39 PM	H2 MFC set to  450.000000
2/5/2013	12:28:39 PM	BCl3 MFC set to  0.750000
2/5/2013	12:28:39 PM	PH3 MFC set to  0.000000
2/5/2013	12:28:39 PM	SiCl4 MFC set to  50.000000
2/5/2013	12:28:39 PM	Bypass solenoid MFC set to  0.000000
2/5/2013	12:28:39 PM	Tube furnace set to 1000
2/5/2013	1:13:39 PM	Helium valve closed
2/5/2013	1:13:39 PM	BCl3 valve closed
2/5/2013	1:13:39 PM	PH3 valve closed
2/5/2013	1:13:39 PM	SiCl4 pre valve closed
2/5/2013	1:13:39 PM	SiCl4 post valve closed
2/5/2013	1:13:39 PM	Main Vac valve closed
2/5/2013	1:13:39 PM	Bypass valve closed
2/5/2013	1:13:39 PM	H2 valve opened
2/5/2013	1:13:39 PM	Bubbler valve opened
2/5/2013	1:13:39 PM	Helium MFC set to  0.000000
2/5/2013	1:13:39 PM	H2 MFC set to  500.000000
2/5/2013	1:13:39 PM	BCl3 MFC set to  0.000000
2/5/2013	1:13:39 PM	PH3 MFC set to  0.000000
2/5/2013	1:13:39 PM	SiCl4 MFC set to  0.000000
2/5/2013	1:13:39 PM	Bypass solenoid MFC set to  0.000000
2/5/2013	1:13:39 PM	Tube furnace set to 950
2/5/2013	1:15:39 PM	Helium valve closed
2/5/2013	1:15:39 PM	BCl3 valve closed
2/5/2013	1:15:39 PM	PH3 valve closed
2/5/2013	1:15:39 PM	SiCl4 pre valve closed
2/5/2013	1:15:39 PM	SiCl4 post valve closed
2/5/2013	1:15:39 PM	Main Vac valve closed
2/5/2013	1:15:39 PM	Bypass valve closed
2/5/2013	1:15:39 PM	H2 valve opened
2/5/2013	1:15:39 PM	Bubbler valve opened
2/5/2013	1:15:39 PM	Helium MFC set to  0.000000
2/5/2013	1:15:39 PM	H2 MFC set to  500.000000
2/5/2013	1:15:39 PM	BCl3 MFC set to  0.000000
2/5/2013	1:15:39 PM	PH3 MFC set to  0.000000
2/5/2013	1:15:39 PM	SiCl4 MFC set to  0.000000
2/5/2013	1:15:39 PM	Bypass solenoid MFC set to  0.000000
2/5/2013	1:15:39 PM	Tube furnace set to 900
2/5/2013	1:17:39 PM	Helium valve closed
2/5/2013	1:17:39 PM	BCl3 valve closed
2/5/2013	1:17:39 PM	PH3 valve closed
2/5/2013	1:17:39 PM	SiCl4 pre valve closed
2/5/2013	1:17:39 PM	SiCl4 post valve closed
2/5/2013	1:17:39 PM	Main Vac valve closed
2/5/2013	1:17:39 PM	Bypass valve closed
2/5/2013	1:17:39 PM	H2 valve opened
2/5/2013	1:17:39 PM	Bubbler valve opened
2/5/2013	1:17:39 PM	Helium MFC set to  0.000000
2/5/2013	1:17:39 PM	H2 MFC set to  500.000000
2/5/2013	1:17:39 PM	BCl3 MFC set to  0.000000
2/5/2013	1:17:39 PM	PH3 MFC set to  0.000000
2/5/2013	1:17:39 PM	SiCl4 MFC set to  0.000000
2/5/2013	1:17:39 PM	Bypass solenoid MFC set to  0.000000
2/5/2013	1:17:39 PM	Tube furnace set to 850
2/5/2013	1:19:39 PM	H2 valve closed
2/5/2013	1:19:39 PM	BCl3 valve closed
2/5/2013	1:19:39 PM	PH3 valve closed
2/5/2013	1:19:39 PM	SiCl4 pre valve closed
2/5/2013	1:19:39 PM	SiCl4 post valve closed
2/5/2013	1:19:40 PM	Main Vac valve closed
2/5/2013	1:19:40 PM	Bypass valve closed
2/5/2013	1:19:40 PM	Helium valve opened
2/5/2013	1:19:40 PM	Bubbler valve opened
2/5/2013	1:19:40 PM	Helium MFC set to  500.000000
2/5/2013	1:19:40 PM	H2 MFC set to  0.000000
2/5/2013	1:19:40 PM	BCl3 MFC set to  0.000000
2/5/2013	1:19:40 PM	PH3 MFC set to  0.000000
2/5/2013	1:19:40 PM	SiCl4 MFC set to  0.000000
2/5/2013	1:19:40 PM	Bypass solenoid MFC set to  0.000000
2/5/2013	1:19:40 PM	Tube furnace set to 800
2/5/2013	1:21:40 PM	H2 valve closed
2/5/2013	1:21:40 PM	BCl3 valve closed
2/5/2013	1:21:40 PM	PH3 valve closed
2/5/2013	1:21:40 PM	SiCl4 pre valve closed
2/5/2013	1:21:40 PM	SiCl4 post valve closed
2/5/2013	1:21:40 PM	Main Vac valve closed
2/5/2013	1:21:40 PM	Bypass valve closed
2/5/2013	1:21:40 PM	Helium valve opened
2/5/2013	1:21:40 PM	Bubbler valve opened
2/5/2013	1:21:40 PM	Helium MFC set to  500.000000
2/5/2013	1:21:40 PM	H2 MFC set to  0.000000
2/5/2013	1:21:40 PM	BCl3 MFC set to  0.000000
2/5/2013	1:21:40 PM	PH3 MFC set to  0.000000
2/5/2013	1:21:40 PM	SiCl4 MFC set to  0.000000
2/5/2013	1:21:40 PM	Bypass solenoid MFC set to  0.000000
2/5/2013	1:21:40 PM	Tube furnace set to 750
2/5/2013	1:23:40 PM	H2 valve closed
2/5/2013	1:23:40 PM	BCl3 valve closed
2/5/2013	1:23:40 PM	PH3 valve closed
2/5/2013	1:23:40 PM	SiCl4 pre valve closed
2/5/2013	1:23:40 PM	SiCl4 post valve closed
2/5/2013	1:23:40 PM	Main Vac valve closed
2/5/2013	1:23:40 PM	Bypass valve closed
2/5/2013	1:23:40 PM	Helium valve opened
2/5/2013	1:23:40 PM	Bubbler valve opened
2/5/2013	1:23:40 PM	Helium MFC set to  500.000000
2/5/2013	1:23:40 PM	H2 MFC set to  0.000000
2/5/2013	1:23:40 PM	BCl3 MFC set to  0.000000
2/5/2013	1:23:40 PM	PH3 MFC set to  0.000000
2/5/2013	1:23:40 PM	SiCl4 MFC set to  0.000000
2/5/2013	1:23:40 PM	Bypass solenoid MFC set to  0.000000
2/5/2013	1:23:40 PM	Tube furnace set to 0
2/5/2013	1:43:40 PM	Helium valve closed
2/5/2013	1:43:40 PM	H2 valve closed
2/5/2013	1:43:40 PM	BCl3 valve closed
2/5/2013	1:43:40 PM	PH3 valve closed
2/5/2013	1:43:40 PM	SiCl4 pre valve closed
2/5/2013	1:43:40 PM	SiCl4 post valve closed
2/5/2013	1:43:40 PM	Main Vac valve closed
2/5/2013	1:43:40 PM	Bypass valve closed
2/5/2013	1:43:40 PM	Bubbler valve closed
2/5/2013	1:43:40 PM	Helium MFC set to  0.000000
2/5/2013	1:43:40 PM	H2 MFC set to  0.000000
2/5/2013	1:43:40 PM	BCl3 MFC set to  0.000000
2/5/2013	1:43:40 PM	PH3 MFC set to  0.000000
2/5/2013	1:43:40 PM	SiCl4 MFC set to  0.000000
2/5/2013	1:43:40 PM	Bypass solenoid MFC set to  0.000000
2/5/2013	1:43:40 PM	Tube furnace set to 0
2/5/2013	1:43:41 PM	Helium valve closed
2/5/2013	1:43:41 PM	H2 valve closed
2/5/2013	1:43:41 PM	BCl3 valve closed
2/5/2013	1:43:41 PM	PH3 valve closed
2/5/2013	1:43:41 PM	SiCl4 pre valve closed
2/5/2013	1:43:41 PM	SiCl4 post valve closed
2/5/2013	1:43:41 PM	Main Vac valve closed
2/5/2013	1:43:41 PM	Bubbler valve closed
2/5/2013	1:43:41 PM	Bypass valve opened
2/5/2013	1:43:41 PM	Helium MFC set to  0.000000
2/5/2013	1:43:41 PM	H2 MFC set to  0.000000
2/5/2013	1:43:41 PM	BCl3 MFC set to  0.000000
2/5/2013	1:43:41 PM	PH3 MFC set to  0.000000
2/5/2013	1:43:41 PM	SiCl4 MFC set to  0.000000
2/5/2013	1:43:41 PM	Bypass solenoid MFC set to  0.000000
2/5/2013	1:43:42 PM	Tube furnace set to 0
2/5/2013	1:44:34 PM	Helium valve closed
2/5/2013	1:44:34 PM	H2 valve closed
2/5/2013	1:44:34 PM	BCl3 valve closed
2/5/2013	1:44:34 PM	PH3 valve closed
2/5/2013	1:44:34 PM	SiCl4 pre valve closed
2/5/2013	1:44:34 PM	SiCl4 post valve closed
2/5/2013	1:44:34 PM	Main Vac valve closed
2/5/2013	1:44:34 PM	Bubbler valve closed
2/5/2013	1:44:34 PM	Bypass valve opened
2/5/2013	1:44:34 PM	Helium MFC set to  0.000000
2/5/2013	1:44:34 PM	H2 MFC set to  0.000000
2/5/2013	1:44:34 PM	BCl3 MFC set to  0.000000
2/5/2013	1:44:34 PM	PH3 MFC set to  0.000000
2/5/2013	1:44:34 PM	SiCl4 MFC set to  0.000000
2/5/2013	1:44:34 PM	Bypass solenoid MFC set to  0.000000
2/5/2013	1:44:35 PM	Tube furnace set to 0
2/5/2013	1:45:35 PM	Helium valve closed
2/5/2013	1:45:35 PM	H2 valve closed
2/5/2013	1:45:35 PM	BCl3 valve closed
2/5/2013	1:45:35 PM	PH3 valve closed
2/5/2013	1:45:35 PM	SiCl4 pre valve closed
2/5/2013	1:45:35 PM	SiCl4 post valve closed
2/5/2013	1:45:35 PM	Bypass valve closed
2/5/2013	1:45:35 PM	Bubbler valve closed
2/5/2013	1:45:35 PM	Main Vac valve opened
2/5/2013	1:45:35 PM	Helium MFC set to  0.000000
2/5/2013	1:45:35 PM	H2 MFC set to  0.000000
2/5/2013	1:45:35 PM	BCl3 MFC set to  0.000000
2/5/2013	1:45:35 PM	PH3 MFC set to  0.000000
2/5/2013	1:45:35 PM	SiCl4 MFC set to  0.000000
2/5/2013	1:45:35 PM	Bypass solenoid MFC set to  0.000000
2/5/2013	1:45:35 PM	Tube furnace set to 0
2/5/2013	1:45:36 PM	Run finished at 1:45 PM
2/5/2013	2:27:42 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/5/2013	2:27:43 PM	Recipe started at 2:27 PM
2/5/2013	2:27:43 PM	Helium valve closed
2/5/2013	2:27:43 PM	H2 valve closed
2/5/2013	2:27:43 PM	BCl3 valve closed
2/5/2013	2:27:43 PM	PH3 valve closed
2/5/2013	2:27:43 PM	SiCl4 pre valve closed
2/5/2013	2:27:43 PM	SiCl4 post valve closed
2/5/2013	2:27:43 PM	Main Vac valve closed
2/5/2013	2:27:43 PM	Bypass valve closed
2/5/2013	2:27:43 PM	Bubbler valve closed
2/5/2013	2:27:43 PM	Helium MFC set to  0.000000
2/5/2013	2:27:43 PM	H2 MFC set to  0.000000
2/5/2013	2:27:43 PM	BCl3 MFC set to  0.000000
2/5/2013	2:27:43 PM	PH3 MFC set to  0.000000
2/5/2013	2:27:43 PM	SiCl4 MFC set to  0.000000
2/5/2013	2:27:43 PM	Bypass solenoid MFC set to  0.000000
2/5/2013	2:27:43 PM	Tube furnace set to 0
2/5/2013	2:27:46 PM	H2 valve closed
2/5/2013	2:27:46 PM	BCl3 valve closed
2/5/2013	2:27:46 PM	PH3 valve closed
2/5/2013	2:27:46 PM	SiCl4 pre valve closed
2/5/2013	2:27:46 PM	SiCl4 post valve closed
2/5/2013	2:27:46 PM	Main Vac valve closed
2/5/2013	2:27:46 PM	Bypass valve closed
2/5/2013	2:27:46 PM	Bubbler valve closed
2/5/2013	2:27:46 PM	Helium valve opened
2/5/2013	2:27:46 PM	Helium MFC set to  500.000000
2/5/2013	2:27:46 PM	H2 MFC set to  0.000000
2/5/2013	2:27:46 PM	BCl3 MFC set to  0.000000
2/5/2013	2:27:46 PM	PH3 MFC set to  0.000000
2/5/2013	2:27:46 PM	SiCl4 MFC set to  0.000000
2/5/2013	2:27:46 PM	Bypass solenoid MFC set to  0.000000
2/5/2013	2:27:46 PM	Tube furnace set to 0
2/5/2013	2:28:59 PM	Helium valve closed
2/5/2013	2:28:59 PM	H2 valve closed
2/5/2013	2:28:59 PM	BCl3 valve closed
2/5/2013	2:28:59 PM	PH3 valve closed
2/5/2013	2:28:59 PM	SiCl4 pre valve closed
2/5/2013	2:28:59 PM	SiCl4 post valve closed
2/5/2013	2:28:59 PM	Main Vac valve closed
2/5/2013	2:28:59 PM	Bypass valve closed
2/5/2013	2:28:59 PM	Bubbler valve closed
2/5/2013	2:28:59 PM	Helium MFC set to  0.000000
2/5/2013	2:28:59 PM	H2 MFC set to  0.000000
2/5/2013	2:28:59 PM	BCl3 MFC set to  0.000000
2/5/2013	2:28:59 PM	PH3 MFC set to  0.000000
2/5/2013	2:28:59 PM	SiCl4 MFC set to  0.000000
2/5/2013	2:28:59 PM	Bypass solenoid MFC set to  0.000000
2/5/2013	2:28:59 PM	Tube furnace set to 0
2/5/2013	2:29:00 PM	Run finished at 2:29 PM
2/5/2013	2:29:00 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/5/2013	2:57:24 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/5/2013	2:57:25 PM	Recipe started at 2:57 PM
2/5/2013	2:57:25 PM	Helium valve closed
2/5/2013	2:57:25 PM	H2 valve closed
2/5/2013	2:57:25 PM	BCl3 valve closed
2/5/2013	2:57:25 PM	PH3 valve closed
2/5/2013	2:57:25 PM	SiCl4 pre valve closed
2/5/2013	2:57:25 PM	SiCl4 post valve closed
2/5/2013	2:57:25 PM	Main Vac valve closed
2/5/2013	2:57:25 PM	Bubbler valve closed
2/5/2013	2:57:25 PM	Bypass valve opened
2/5/2013	2:57:25 PM	Helium MFC set to  0.000000
2/5/2013	2:57:25 PM	H2 MFC set to  0.000000
2/5/2013	2:57:25 PM	BCl3 MFC set to  0.000000
2/5/2013	2:57:25 PM	PH3 MFC set to  0.000000
2/5/2013	2:57:25 PM	SiCl4 MFC set to  0.000000
2/5/2013	2:57:25 PM	Bypass solenoid MFC set to  0.000000
2/5/2013	2:57:25 PM	Tube furnace set to 0
2/5/2013	2:58:52 PM	Helium valve closed
2/5/2013	2:58:52 PM	H2 valve closed
2/5/2013	2:58:52 PM	BCl3 valve closed
2/5/2013	2:58:52 PM	PH3 valve closed
2/5/2013	2:58:52 PM	SiCl4 pre valve closed
2/5/2013	2:58:52 PM	SiCl4 post valve closed
2/5/2013	2:58:52 PM	Main Vac valve closed
2/5/2013	2:58:52 PM	Bubbler valve closed
2/5/2013	2:58:52 PM	Bypass valve opened
2/5/2013	2:58:52 PM	Helium MFC set to  0.000000
2/5/2013	2:58:52 PM	H2 MFC set to  0.000000
2/5/2013	2:58:52 PM	BCl3 MFC set to  0.000000
2/5/2013	2:58:52 PM	PH3 MFC set to  0.000000
2/5/2013	2:58:52 PM	SiCl4 MFC set to  0.000000
2/5/2013	2:58:52 PM	Bypass solenoid MFC set to  0.000000
2/5/2013	2:58:52 PM	Tube furnace set to 0
2/5/2013	2:59:52 PM	Helium valve closed
2/5/2013	2:59:52 PM	H2 valve closed
2/5/2013	2:59:52 PM	BCl3 valve closed
2/5/2013	2:59:52 PM	PH3 valve closed
2/5/2013	2:59:52 PM	SiCl4 pre valve closed
2/5/2013	2:59:52 PM	SiCl4 post valve closed
2/5/2013	2:59:52 PM	Bypass valve closed
2/5/2013	2:59:52 PM	Bubbler valve closed
2/5/2013	2:59:52 PM	Main Vac valve opened
2/5/2013	2:59:52 PM	Helium MFC set to  0.000000
2/5/2013	2:59:52 PM	H2 MFC set to  0.000000
2/5/2013	2:59:52 PM	BCl3 MFC set to  0.000000
2/5/2013	2:59:52 PM	PH3 MFC set to  0.000000
2/5/2013	2:59:52 PM	SiCl4 MFC set to  0.000000
2/5/2013	2:59:52 PM	Bypass solenoid MFC set to  0.000000
2/5/2013	2:59:52 PM	Tube furnace set to 0
2/5/2013	2:59:53 PM	Run finished at 2:59 PM
2/5/2013	2:59:53 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/5/2013	3:28:55 PM	Recipe started at 3:28 PM
2/5/2013	3:28:55 PM	Helium valve closed
2/5/2013	3:28:55 PM	BCl3 valve closed
2/5/2013	3:28:55 PM	PH3 valve closed
2/5/2013	3:28:55 PM	SiCl4 pre valve closed
2/5/2013	3:28:55 PM	SiCl4 post valve closed
2/5/2013	3:28:55 PM	Bypass valve closed
2/5/2013	3:28:55 PM	Bubbler valve closed
2/5/2013	3:28:55 PM	H2 valve opened
2/5/2013	3:28:55 PM	Main Vac valve opened
2/5/2013	3:28:55 PM	Helium MFC set to  0.000000
2/5/2013	3:28:55 PM	H2 MFC set to  0.000000
2/5/2013	3:28:55 PM	BCl3 MFC set to  0.000000
2/5/2013	3:28:55 PM	PH3 MFC set to  0.000000
2/5/2013	3:28:55 PM	SiCl4 MFC set to  0.000000
2/5/2013	3:28:55 PM	Bypass solenoid MFC set to  0.000000
2/5/2013	3:28:55 PM	Tube furnace set to 150
2/5/2013	3:29:25 PM	H2 valve closed
2/5/2013	3:29:25 PM	BCl3 valve closed
2/5/2013	3:29:25 PM	PH3 valve closed
2/5/2013	3:29:25 PM	SiCl4 pre valve closed
2/5/2013	3:29:25 PM	SiCl4 post valve closed
2/5/2013	3:29:25 PM	Bypass valve closed
2/5/2013	3:29:25 PM	Bubbler valve closed
2/5/2013	3:29:25 PM	Helium valve opened
2/5/2013	3:29:25 PM	Main Vac valve opened
2/5/2013	3:29:25 PM	Helium MFC set to  20.000000
2/5/2013	3:29:25 PM	H2 MFC set to  0.000000
2/5/2013	3:29:25 PM	BCl3 MFC set to  0.000000
2/5/2013	3:29:25 PM	PH3 MFC set to  0.000000
2/5/2013	3:29:25 PM	SiCl4 MFC set to  0.000000
2/5/2013	3:29:25 PM	Bypass solenoid MFC set to  0.000000
2/5/2013	3:29:25 PM	Tube furnace set to 150
2/5/2013	3:29:55 PM	Helium valve closed
2/5/2013	3:29:55 PM	H2 valve closed
2/5/2013	3:29:55 PM	BCl3 valve closed
2/5/2013	3:29:55 PM	PH3 valve closed
2/5/2013	3:29:55 PM	SiCl4 pre valve closed
2/5/2013	3:29:55 PM	SiCl4 post valve closed
2/5/2013	3:29:55 PM	Bypass valve closed
2/5/2013	3:29:55 PM	Bubbler valve closed
2/5/2013	3:29:55 PM	Main Vac valve opened
2/5/2013	3:29:55 PM	Helium MFC set to  0.000000
2/5/2013	3:29:55 PM	H2 MFC set to  0.000000
2/5/2013	3:29:55 PM	BCl3 MFC set to  0.000000
2/5/2013	3:29:55 PM	PH3 MFC set to  0.000000
2/5/2013	3:29:55 PM	SiCl4 MFC set to  0.000000
2/5/2013	3:29:55 PM	Bypass solenoid MFC set to  0.000000
2/5/2013	3:29:56 PM	Tube furnace set to 150
2/5/2013	3:30:26 PM	H2 valve closed
2/5/2013	3:30:26 PM	BCl3 valve closed
2/5/2013	3:30:26 PM	PH3 valve closed
2/5/2013	3:30:26 PM	SiCl4 pre valve closed
2/5/2013	3:30:26 PM	SiCl4 post valve closed
2/5/2013	3:30:26 PM	Bypass valve closed
2/5/2013	3:30:26 PM	Bubbler valve closed
2/5/2013	3:30:26 PM	Helium valve opened
2/5/2013	3:30:26 PM	Main Vac valve opened
2/5/2013	3:30:26 PM	Helium MFC set to  20.000000
2/5/2013	3:30:26 PM	H2 MFC set to  0.000000
2/5/2013	3:30:26 PM	BCl3 MFC set to  0.000000
2/5/2013	3:30:26 PM	PH3 MFC set to  0.000000
2/5/2013	3:30:26 PM	SiCl4 MFC set to  0.000000
2/5/2013	3:30:26 PM	Bypass solenoid MFC set to  0.000000
2/5/2013	3:30:26 PM	Tube furnace set to 150
2/5/2013	3:30:56 PM	Helium valve closed
2/5/2013	3:30:56 PM	H2 valve closed
2/5/2013	3:30:56 PM	BCl3 valve closed
2/5/2013	3:30:56 PM	PH3 valve closed
2/5/2013	3:30:56 PM	SiCl4 pre valve closed
2/5/2013	3:30:56 PM	SiCl4 post valve closed
2/5/2013	3:30:56 PM	Bypass valve closed
2/5/2013	3:30:56 PM	Bubbler valve closed
2/5/2013	3:30:56 PM	Main Vac valve opened
2/5/2013	3:30:56 PM	Helium MFC set to  0.000000
2/5/2013	3:30:56 PM	H2 MFC set to  0.000000
2/5/2013	3:30:56 PM	BCl3 MFC set to  0.000000
2/5/2013	3:30:56 PM	PH3 MFC set to  0.000000
2/5/2013	3:30:56 PM	SiCl4 MFC set to  0.000000
2/5/2013	3:30:56 PM	Bypass solenoid MFC set to  0.000000
2/5/2013	3:30:56 PM	Tube furnace set to 150
2/5/2013	3:31:26 PM	H2 valve closed
2/5/2013	3:31:26 PM	BCl3 valve closed
2/5/2013	3:31:26 PM	PH3 valve closed
2/5/2013	3:31:26 PM	SiCl4 pre valve closed
2/5/2013	3:31:26 PM	SiCl4 post valve closed
2/5/2013	3:31:26 PM	Bypass valve closed
2/5/2013	3:31:26 PM	Bubbler valve closed
2/5/2013	3:31:26 PM	Helium valve opened
2/5/2013	3:31:26 PM	Main Vac valve opened
2/5/2013	3:31:26 PM	Helium MFC set to  20.000000
2/5/2013	3:31:26 PM	H2 MFC set to  0.000000
2/5/2013	3:31:26 PM	BCl3 MFC set to  0.000000
2/5/2013	3:31:26 PM	PH3 MFC set to  0.000000
2/5/2013	3:31:26 PM	SiCl4 MFC set to  0.000000
2/5/2013	3:31:26 PM	Bypass solenoid MFC set to  0.000000
2/5/2013	3:31:26 PM	Tube furnace set to 150
2/5/2013	3:33:26 PM	Helium valve closed
2/5/2013	3:33:26 PM	H2 valve closed
2/5/2013	3:33:26 PM	BCl3 valve closed
2/5/2013	3:33:26 PM	PH3 valve closed
2/5/2013	3:33:26 PM	SiCl4 pre valve closed
2/5/2013	3:33:26 PM	SiCl4 post valve closed
2/5/2013	3:33:26 PM	Bypass valve closed
2/5/2013	3:33:26 PM	Bubbler valve closed
2/5/2013	3:33:26 PM	Main Vac valve opened
2/5/2013	3:33:26 PM	Helium MFC set to  0.000000
2/5/2013	3:33:26 PM	H2 MFC set to  0.000000
2/5/2013	3:33:26 PM	BCl3 MFC set to  0.000000
2/5/2013	3:33:26 PM	PH3 MFC set to  0.000000
2/5/2013	3:33:26 PM	SiCl4 MFC set to  0.000000
2/5/2013	3:33:26 PM	Bypass solenoid MFC set to  0.000000
2/5/2013	3:33:27 PM	Tube furnace set to 150
2/5/2013	3:33:57 PM	H2 valve closed
2/5/2013	3:33:57 PM	BCl3 valve closed
2/5/2013	3:33:57 PM	PH3 valve closed
2/5/2013	3:33:57 PM	SiCl4 pre valve closed
2/5/2013	3:33:57 PM	SiCl4 post valve closed
2/5/2013	3:33:57 PM	Bypass valve closed
2/5/2013	3:33:57 PM	Bubbler valve closed
2/5/2013	3:33:57 PM	Helium valve opened
2/5/2013	3:33:57 PM	Main Vac valve opened
2/5/2013	3:33:57 PM	Helium MFC set to  20.000000
2/5/2013	3:33:57 PM	H2 MFC set to  0.000000
2/5/2013	3:33:57 PM	BCl3 MFC set to  0.000000
2/5/2013	3:33:57 PM	PH3 MFC set to  0.000000
2/5/2013	3:33:57 PM	SiCl4 MFC set to  0.000000
2/5/2013	3:33:57 PM	Bypass solenoid MFC set to  0.000000
2/5/2013	3:33:57 PM	Tube furnace set to 150
2/5/2013	3:34:27 PM	Helium valve closed
2/5/2013	3:34:27 PM	H2 valve closed
2/5/2013	3:34:27 PM	BCl3 valve closed
2/5/2013	3:34:27 PM	PH3 valve closed
2/5/2013	3:34:27 PM	SiCl4 pre valve closed
2/5/2013	3:34:27 PM	SiCl4 post valve closed
2/5/2013	3:34:27 PM	Bypass valve closed
2/5/2013	3:34:27 PM	Bubbler valve closed
2/5/2013	3:34:27 PM	Main Vac valve opened
2/5/2013	3:34:27 PM	Helium MFC set to  0.000000
2/5/2013	3:34:27 PM	H2 MFC set to  0.000000
2/5/2013	3:34:27 PM	BCl3 MFC set to  0.000000
2/5/2013	3:34:27 PM	PH3 MFC set to  0.000000
2/5/2013	3:34:27 PM	SiCl4 MFC set to  0.000000
2/5/2013	3:34:27 PM	Bypass solenoid MFC set to  0.000000
2/5/2013	3:34:27 PM	Tube furnace set to 150
2/5/2013	3:34:57 PM	H2 valve closed
2/5/2013	3:34:57 PM	BCl3 valve closed
2/5/2013	3:34:57 PM	PH3 valve closed
2/5/2013	3:34:57 PM	SiCl4 pre valve closed
2/5/2013	3:34:57 PM	SiCl4 post valve closed
2/5/2013	3:34:57 PM	Bypass valve closed
2/5/2013	3:34:57 PM	Bubbler valve closed
2/5/2013	3:34:57 PM	Helium valve opened
2/5/2013	3:34:57 PM	Main Vac valve opened
2/5/2013	3:34:57 PM	Helium MFC set to  20.000000
2/5/2013	3:34:57 PM	H2 MFC set to  0.000000
2/5/2013	3:34:57 PM	BCl3 MFC set to  0.000000
2/5/2013	3:34:57 PM	PH3 MFC set to  0.000000
2/5/2013	3:34:57 PM	SiCl4 MFC set to  0.000000
2/5/2013	3:34:57 PM	Bypass solenoid MFC set to  0.000000
2/5/2013	3:34:57 PM	Tube furnace set to 150
2/5/2013	3:35:27 PM	Helium valve closed
2/5/2013	3:35:27 PM	H2 valve closed
2/5/2013	3:35:27 PM	BCl3 valve closed
2/5/2013	3:35:27 PM	PH3 valve closed
2/5/2013	3:35:27 PM	SiCl4 pre valve closed
2/5/2013	3:35:27 PM	SiCl4 post valve closed
2/5/2013	3:35:27 PM	Bypass valve closed
2/5/2013	3:35:27 PM	Bubbler valve closed
2/5/2013	3:35:27 PM	Main Vac valve opened
2/5/2013	3:35:27 PM	Helium MFC set to  0.000000
2/5/2013	3:35:27 PM	H2 MFC set to  0.000000
2/5/2013	3:35:27 PM	BCl3 MFC set to  0.000000
2/5/2013	3:35:27 PM	PH3 MFC set to  0.000000
2/5/2013	3:35:27 PM	SiCl4 MFC set to  0.000000
2/5/2013	3:35:27 PM	Bypass solenoid MFC set to  0.000000
2/5/2013	3:35:28 PM	Tube furnace set to 150
2/5/2013	3:35:58 PM	H2 valve closed
2/5/2013	3:35:58 PM	BCl3 valve closed
2/5/2013	3:35:58 PM	PH3 valve closed
2/5/2013	3:35:58 PM	SiCl4 pre valve closed
2/5/2013	3:35:58 PM	SiCl4 post valve closed
2/5/2013	3:35:58 PM	Bypass valve closed
2/5/2013	3:35:58 PM	Bubbler valve closed
2/5/2013	3:35:58 PM	Helium valve opened
2/5/2013	3:35:58 PM	Main Vac valve opened
2/5/2013	3:35:58 PM	Helium MFC set to  20.000000
2/5/2013	3:35:58 PM	H2 MFC set to  0.000000
2/5/2013	3:35:58 PM	BCl3 MFC set to  0.000000
2/5/2013	3:35:58 PM	PH3 MFC set to  0.000000
2/5/2013	3:35:58 PM	SiCl4 MFC set to  0.000000
2/5/2013	3:35:58 PM	Bypass solenoid MFC set to  0.000000
2/5/2013	3:35:58 PM	Tube furnace set to 150
2/5/2013	3:37:58 PM	Helium valve closed
2/5/2013	3:37:58 PM	H2 valve closed
2/5/2013	3:37:58 PM	BCl3 valve closed
2/5/2013	3:37:58 PM	PH3 valve closed
2/5/2013	3:37:58 PM	SiCl4 pre valve closed
2/5/2013	3:37:58 PM	SiCl4 post valve closed
2/5/2013	3:37:58 PM	Bypass valve closed
2/5/2013	3:37:58 PM	Bubbler valve closed
2/5/2013	3:37:58 PM	Main Vac valve opened
2/5/2013	3:37:58 PM	Helium MFC set to  0.000000
2/5/2013	3:37:58 PM	H2 MFC set to  0.000000
2/5/2013	3:37:58 PM	BCl3 MFC set to  0.000000
2/5/2013	3:37:58 PM	PH3 MFC set to  0.000000
2/5/2013	3:37:58 PM	SiCl4 MFC set to  0.000000
2/5/2013	3:37:58 PM	Bypass solenoid MFC set to  0.000000
2/5/2013	3:37:58 PM	Tube furnace set to 150
2/5/2013	3:38:28 PM	H2 valve closed
2/5/2013	3:38:28 PM	BCl3 valve closed
2/5/2013	3:38:28 PM	PH3 valve closed
2/5/2013	3:38:28 PM	SiCl4 pre valve closed
2/5/2013	3:38:28 PM	SiCl4 post valve closed
2/5/2013	3:38:28 PM	Bypass valve closed
2/5/2013	3:38:28 PM	Bubbler valve closed
2/5/2013	3:38:28 PM	Helium valve opened
2/5/2013	3:38:28 PM	Main Vac valve opened
2/5/2013	3:38:28 PM	Helium MFC set to  20.000000
2/5/2013	3:38:28 PM	H2 MFC set to  0.000000
2/5/2013	3:38:28 PM	BCl3 MFC set to  0.000000
2/5/2013	3:38:28 PM	PH3 MFC set to  0.000000
2/5/2013	3:38:28 PM	SiCl4 MFC set to  0.000000
2/5/2013	3:38:28 PM	Bypass solenoid MFC set to  0.000000
2/5/2013	3:38:28 PM	Tube furnace set to 150
2/5/2013	3:38:58 PM	Helium valve closed
2/5/2013	3:38:58 PM	H2 valve closed
2/5/2013	3:38:58 PM	BCl3 valve closed
2/5/2013	3:38:58 PM	PH3 valve closed
2/5/2013	3:38:58 PM	SiCl4 pre valve closed
2/5/2013	3:38:58 PM	SiCl4 post valve closed
2/5/2013	3:38:58 PM	Bypass valve closed
2/5/2013	3:38:58 PM	Bubbler valve closed
2/5/2013	3:38:58 PM	Main Vac valve opened
2/5/2013	3:38:58 PM	Helium MFC set to  0.000000
2/5/2013	3:38:58 PM	H2 MFC set to  0.000000
2/5/2013	3:38:58 PM	BCl3 MFC set to  0.000000
2/5/2013	3:38:58 PM	PH3 MFC set to  0.000000
2/5/2013	3:38:58 PM	SiCl4 MFC set to  0.000000
2/5/2013	3:38:58 PM	Bypass solenoid MFC set to  0.000000
2/5/2013	3:38:59 PM	Tube furnace set to 150
2/5/2013	3:39:29 PM	H2 valve closed
2/5/2013	3:39:29 PM	BCl3 valve closed
2/5/2013	3:39:29 PM	PH3 valve closed
2/5/2013	3:39:29 PM	SiCl4 pre valve closed
2/5/2013	3:39:29 PM	SiCl4 post valve closed
2/5/2013	3:39:29 PM	Bypass valve closed
2/5/2013	3:39:29 PM	Bubbler valve closed
2/5/2013	3:39:29 PM	Helium valve opened
2/5/2013	3:39:29 PM	Main Vac valve opened
2/5/2013	3:39:29 PM	Helium MFC set to  20.000000
2/5/2013	3:39:29 PM	H2 MFC set to  0.000000
2/5/2013	3:39:29 PM	BCl3 MFC set to  0.000000
2/5/2013	3:39:29 PM	PH3 MFC set to  0.000000
2/5/2013	3:39:29 PM	SiCl4 MFC set to  0.000000
2/5/2013	3:39:29 PM	Bypass solenoid MFC set to  0.000000
2/5/2013	3:39:29 PM	Tube furnace set to 150
2/5/2013	3:41:29 PM	Helium valve closed
2/5/2013	3:41:29 PM	H2 valve closed
2/5/2013	3:41:29 PM	BCl3 valve closed
2/5/2013	3:41:29 PM	PH3 valve closed
2/5/2013	3:41:29 PM	SiCl4 pre valve closed
2/5/2013	3:41:29 PM	SiCl4 post valve closed
2/5/2013	3:41:29 PM	Bypass valve closed
2/5/2013	3:41:29 PM	Bubbler valve closed
2/5/2013	3:41:29 PM	Main Vac valve opened
2/5/2013	3:41:29 PM	Helium MFC set to  0.000000
2/5/2013	3:41:29 PM	H2 MFC set to  0.000000
2/5/2013	3:41:29 PM	BCl3 MFC set to  0.000000
2/5/2013	3:41:29 PM	PH3 MFC set to  0.000000
2/5/2013	3:41:29 PM	SiCl4 MFC set to  0.000000
2/5/2013	3:41:29 PM	Bypass solenoid MFC set to  0.000000
2/5/2013	3:41:29 PM	Tube furnace set to 150
2/5/2013	3:41:59 PM	H2 valve closed
2/5/2013	3:41:59 PM	BCl3 valve closed
2/5/2013	3:41:59 PM	PH3 valve closed
2/5/2013	3:41:59 PM	SiCl4 pre valve closed
2/5/2013	3:41:59 PM	SiCl4 post valve closed
2/5/2013	3:41:59 PM	Bypass valve closed
2/5/2013	3:41:59 PM	Bubbler valve closed
2/5/2013	3:41:59 PM	Helium valve opened
2/5/2013	3:41:59 PM	Main Vac valve opened
2/5/2013	3:41:59 PM	Helium MFC set to  20.000000
2/5/2013	3:41:59 PM	H2 MFC set to  0.000000
2/5/2013	3:41:59 PM	BCl3 MFC set to  0.000000
2/5/2013	3:41:59 PM	PH3 MFC set to  0.000000
2/5/2013	3:41:59 PM	SiCl4 MFC set to  0.000000
2/5/2013	3:41:59 PM	Bypass solenoid MFC set to  0.000000
2/5/2013	3:41:59 PM	Tube furnace set to 150
2/5/2013	3:42:29 PM	Helium valve closed
2/5/2013	3:42:29 PM	H2 valve closed
2/5/2013	3:42:29 PM	BCl3 valve closed
2/5/2013	3:42:29 PM	PH3 valve closed
2/5/2013	3:42:29 PM	SiCl4 pre valve closed
2/5/2013	3:42:29 PM	SiCl4 post valve closed
2/5/2013	3:42:29 PM	Bypass valve closed
2/5/2013	3:42:29 PM	Bubbler valve closed
2/5/2013	3:42:29 PM	Main Vac valve opened
2/5/2013	3:42:29 PM	Helium MFC set to  0.000000
2/5/2013	3:42:29 PM	H2 MFC set to  0.000000
2/5/2013	3:42:29 PM	BCl3 MFC set to  0.000000
2/5/2013	3:42:29 PM	PH3 MFC set to  0.000000
2/5/2013	3:42:29 PM	SiCl4 MFC set to  0.000000
2/5/2013	3:42:29 PM	Bypass solenoid MFC set to  0.000000
2/5/2013	3:42:30 PM	Tube furnace set to 150
2/5/2013	3:43:00 PM	H2 valve closed
2/5/2013	3:43:00 PM	BCl3 valve closed
2/5/2013	3:43:00 PM	PH3 valve closed
2/5/2013	3:43:00 PM	SiCl4 pre valve closed
2/5/2013	3:43:00 PM	SiCl4 post valve closed
2/5/2013	3:43:00 PM	Bypass valve closed
2/5/2013	3:43:00 PM	Bubbler valve closed
2/5/2013	3:43:00 PM	Helium valve opened
2/5/2013	3:43:00 PM	Main Vac valve opened
2/5/2013	3:43:00 PM	Helium MFC set to  20.000000
2/5/2013	3:43:00 PM	H2 MFC set to  0.000000
2/5/2013	3:43:00 PM	BCl3 MFC set to  0.000000
2/5/2013	3:43:00 PM	PH3 MFC set to  0.000000
2/5/2013	3:43:00 PM	SiCl4 MFC set to  0.000000
2/5/2013	3:43:00 PM	Bypass solenoid MFC set to  0.000000
2/5/2013	3:43:00 PM	Tube furnace set to 150
2/5/2013	3:45:00 PM	Helium valve closed
2/5/2013	3:45:00 PM	H2 valve closed
2/5/2013	3:45:00 PM	BCl3 valve closed
2/5/2013	3:45:00 PM	PH3 valve closed
2/5/2013	3:45:00 PM	SiCl4 pre valve closed
2/5/2013	3:45:00 PM	SiCl4 post valve closed
2/5/2013	3:45:00 PM	Bypass valve closed
2/5/2013	3:45:00 PM	Bubbler valve closed
2/5/2013	3:45:00 PM	Main Vac valve opened
2/5/2013	3:45:00 PM	Helium MFC set to  0.000000
2/5/2013	3:45:00 PM	H2 MFC set to  0.000000
2/5/2013	3:45:00 PM	BCl3 MFC set to  0.000000
2/5/2013	3:45:00 PM	PH3 MFC set to  0.000000
2/5/2013	3:45:00 PM	SiCl4 MFC set to  0.000000
2/5/2013	3:45:00 PM	Bypass solenoid MFC set to  0.000000
2/5/2013	3:45:00 PM	Tube furnace set to 150
2/5/2013	3:45:01 PM	Run finished at 3:45 PM
2/5/2013	4:02:47 PM	Recipe started at 4:02 PM
2/5/2013	4:02:47 PM	Helium valve closed
2/5/2013	4:02:47 PM	H2 valve closed
2/5/2013	4:02:47 PM	BCl3 valve closed
2/5/2013	4:02:47 PM	PH3 valve closed
2/5/2013	4:02:47 PM	SiCl4 pre valve closed
2/5/2013	4:02:47 PM	SiCl4 post valve closed
2/5/2013	4:02:47 PM	Main Vac valve closed
2/5/2013	4:02:47 PM	Bypass valve closed
2/5/2013	4:02:47 PM	Bubbler valve closed
2/5/2013	4:02:47 PM	Helium MFC set to  0.000000
2/5/2013	4:02:47 PM	H2 MFC set to  0.000000
2/5/2013	4:02:47 PM	BCl3 MFC set to  0.000000
2/5/2013	4:02:47 PM	PH3 MFC set to  0.000000
2/5/2013	4:02:47 PM	SiCl4 MFC set to  0.000000
2/5/2013	4:02:47 PM	Bypass solenoid MFC set to  0.000000
2/5/2013	4:02:47 PM	Tube furnace set to 0
2/5/2013	4:02:50 PM	Helium valve closed
2/5/2013	4:02:50 PM	BCl3 valve closed
2/5/2013	4:02:50 PM	PH3 valve closed
2/5/2013	4:02:50 PM	SiCl4 pre valve closed
2/5/2013	4:02:50 PM	SiCl4 post valve closed
2/5/2013	4:02:50 PM	Main Vac valve closed
2/5/2013	4:02:50 PM	Bypass valve closed
2/5/2013	4:02:50 PM	Bubbler valve closed
2/5/2013	4:02:50 PM	H2 valve opened
2/5/2013	4:02:50 PM	Helium MFC set to  0.000000
2/5/2013	4:02:50 PM	H2 MFC set to  500.000000
2/5/2013	4:02:50 PM	BCl3 MFC set to  0.000000
2/5/2013	4:02:50 PM	PH3 MFC set to  0.000000
2/5/2013	4:02:50 PM	SiCl4 MFC set to  0.000000
2/5/2013	4:02:50 PM	Bypass solenoid MFC set to  0.000000
2/5/2013	4:02:50 PM	Tube furnace set to 0
2/5/2013	4:03:00 PM	Run aborted at 4:03 PM
2/5/2013	4:03:00 PM	Helium valve closed
2/5/2013	4:03:00 PM	H2 valve closed
2/5/2013	4:03:00 PM	BCl3 valve closed
2/5/2013	4:03:00 PM	PH3 valve closed
2/5/2013	4:03:00 PM	SiCl4 pre valve closed
2/5/2013	4:03:00 PM	SiCl4 post valve closed
2/5/2013	4:03:00 PM	Bypass valve closed
2/5/2013	4:03:00 PM	Main Vac valve closed
2/5/2013	4:03:00 PM	Bubbler valve closed
2/5/2013	4:03:00 PM	Helium MFC set to  0.000000
2/5/2013	4:03:00 PM	H2 MFC set to  0.000000
2/5/2013	4:03:00 PM	BCl3 MFC set to  0.000000
2/5/2013	4:03:00 PM	PH3 MFC set to  0.000000
2/5/2013	4:03:00 PM	SiCl4 MFC set to  0.000000
2/5/2013	4:03:00 PM	Tube furnace set to 0
2/5/2013	4:03:12 PM	Recipe started at 4:03 PM
2/5/2013	4:03:12 PM	Helium valve closed
2/5/2013	4:03:12 PM	H2 valve closed
2/5/2013	4:03:12 PM	BCl3 valve closed
2/5/2013	4:03:12 PM	PH3 valve closed
2/5/2013	4:03:12 PM	SiCl4 pre valve closed
2/5/2013	4:03:12 PM	SiCl4 post valve closed
2/5/2013	4:03:12 PM	Main Vac valve closed
2/5/2013	4:03:12 PM	Bypass valve closed
2/5/2013	4:03:12 PM	Bubbler valve closed
2/5/2013	4:03:12 PM	Helium MFC set to  0.000000
2/5/2013	4:03:12 PM	H2 MFC set to  0.000000
2/5/2013	4:03:12 PM	BCl3 MFC set to  0.000000
2/5/2013	4:03:12 PM	PH3 MFC set to  0.000000
2/5/2013	4:03:12 PM	SiCl4 MFC set to  0.000000
2/5/2013	4:03:12 PM	Bypass solenoid MFC set to  0.000000
2/5/2013	4:03:12 PM	Tube furnace set to 0
2/5/2013	4:03:15 PM	Helium valve closed
2/5/2013	4:03:15 PM	BCl3 valve closed
2/5/2013	4:03:15 PM	PH3 valve closed
2/5/2013	4:03:15 PM	SiCl4 pre valve closed
2/5/2013	4:03:15 PM	SiCl4 post valve closed
2/5/2013	4:03:15 PM	Main Vac valve closed
2/5/2013	4:03:15 PM	Bypass valve closed
2/5/2013	4:03:15 PM	Bubbler valve closed
2/5/2013	4:03:15 PM	H2 valve opened
2/5/2013	4:03:15 PM	Helium MFC set to  0.000000
2/5/2013	4:03:15 PM	H2 MFC set to  500.000000
2/5/2013	4:03:15 PM	BCl3 MFC set to  0.000000
2/5/2013	4:03:15 PM	PH3 MFC set to  0.000000
2/5/2013	4:03:15 PM	SiCl4 MFC set to  0.000000
2/5/2013	4:03:15 PM	Bypass solenoid MFC set to  0.000000
2/5/2013	4:03:15 PM	Tube furnace set to 0
2/5/2013	4:04:18 PM	Helium valve closed
2/5/2013	4:04:18 PM	BCl3 valve closed
2/5/2013	4:04:18 PM	PH3 valve closed
2/5/2013	4:04:18 PM	SiCl4 pre valve closed
2/5/2013	4:04:18 PM	SiCl4 post valve closed
2/5/2013	4:04:18 PM	Main Vac valve closed
2/5/2013	4:04:18 PM	Bypass valve closed
2/5/2013	4:04:18 PM	H2 valve opened
2/5/2013	4:04:18 PM	Bubbler valve opened
2/5/2013	4:04:18 PM	Helium MFC set to  0.000000
2/5/2013	4:04:18 PM	H2 MFC set to  500.000000
2/5/2013	4:04:18 PM	BCl3 MFC set to  0.000000
2/5/2013	4:04:18 PM	PH3 MFC set to  0.000000
2/5/2013	4:04:18 PM	SiCl4 MFC set to  0.000000
2/5/2013	4:04:18 PM	Bypass solenoid MFC set to  0.000000
2/5/2013	4:04:19 PM	Tube furnace set to 0
2/5/2013	4:04:20 PM	Helium valve closed
2/5/2013	4:04:20 PM	BCl3 valve closed
2/5/2013	4:04:20 PM	PH3 valve closed
2/5/2013	4:04:20 PM	SiCl4 pre valve closed
2/5/2013	4:04:20 PM	SiCl4 post valve closed
2/5/2013	4:04:20 PM	Main Vac valve closed
2/5/2013	4:04:20 PM	Bypass valve closed
2/5/2013	4:04:20 PM	H2 valve opened
2/5/2013	4:04:20 PM	Bubbler valve opened
2/5/2013	4:04:20 PM	Helium MFC set to  0.000000
2/5/2013	4:04:20 PM	H2 MFC set to  500.000000
2/5/2013	4:04:20 PM	BCl3 MFC set to  0.000000
2/5/2013	4:04:20 PM	PH3 MFC set to  0.000000
2/5/2013	4:04:20 PM	SiCl4 MFC set to  0.000000
2/5/2013	4:04:20 PM	Bypass solenoid MFC set to  0.000000
2/5/2013	4:04:20 PM	Tube furnace set to 1000
2/5/2013	4:24:20 PM	Helium valve closed
2/5/2013	4:24:20 PM	BCl3 valve closed
2/5/2013	4:24:20 PM	PH3 valve closed
2/5/2013	4:24:20 PM	Main Vac valve closed
2/5/2013	4:24:20 PM	Bypass valve closed
2/5/2013	4:24:20 PM	H2 valve opened
2/5/2013	4:24:20 PM	SiCl4 pre valve opened
2/5/2013	4:24:20 PM	SiCl4 post valve opened
2/5/2013	4:24:20 PM	Bubbler valve opened
2/5/2013	4:24:20 PM	Helium MFC set to  0.000000
2/5/2013	4:24:20 PM	H2 MFC set to  450.000000
2/5/2013	4:24:20 PM	BCl3 MFC set to  0.000000
2/5/2013	4:24:20 PM	PH3 MFC set to  0.000000
2/5/2013	4:24:20 PM	SiCl4 MFC set to  50.000000
2/5/2013	4:24:20 PM	Bypass solenoid MFC set to  0.000000
2/5/2013	4:24:20 PM	Tube furnace set to 1000
2/5/2013	4:54:20 PM	Helium valve closed
2/5/2013	4:54:20 PM	BCl3 valve closed
2/5/2013	4:54:20 PM	PH3 valve closed
2/5/2013	4:54:20 PM	SiCl4 pre valve closed
2/5/2013	4:54:20 PM	SiCl4 post valve closed
2/5/2013	4:54:20 PM	Main Vac valve closed
2/5/2013	4:54:20 PM	Bypass valve closed
2/5/2013	4:54:20 PM	H2 valve opened
2/5/2013	4:54:20 PM	Bubbler valve opened
2/5/2013	4:54:20 PM	Helium MFC set to  0.000000
2/5/2013	4:54:20 PM	H2 MFC set to  500.000000
2/5/2013	4:54:20 PM	BCl3 MFC set to  0.000000
2/5/2013	4:54:20 PM	PH3 MFC set to  0.000000
2/5/2013	4:54:20 PM	SiCl4 MFC set to  0.000000
2/5/2013	4:54:20 PM	Bypass solenoid MFC set to  0.000000
2/5/2013	4:54:20 PM	Tube furnace set to 950
2/5/2013	4:56:20 PM	Helium valve closed
2/5/2013	4:56:20 PM	BCl3 valve closed
2/5/2013	4:56:20 PM	PH3 valve closed
2/5/2013	4:56:20 PM	SiCl4 pre valve closed
2/5/2013	4:56:20 PM	SiCl4 post valve closed
2/5/2013	4:56:20 PM	Main Vac valve closed
2/5/2013	4:56:20 PM	Bypass valve closed
2/5/2013	4:56:20 PM	H2 valve opened
2/5/2013	4:56:20 PM	Bubbler valve opened
2/5/2013	4:56:20 PM	Helium MFC set to  0.000000
2/5/2013	4:56:20 PM	H2 MFC set to  500.000000
2/5/2013	4:56:20 PM	BCl3 MFC set to  0.000000
2/5/2013	4:56:20 PM	PH3 MFC set to  0.000000
2/5/2013	4:56:20 PM	SiCl4 MFC set to  0.000000
2/5/2013	4:56:20 PM	Bypass solenoid MFC set to  0.000000
2/5/2013	4:56:20 PM	Tube furnace set to 900
2/5/2013	4:58:21 PM	Helium valve closed
2/5/2013	4:58:21 PM	BCl3 valve closed
2/5/2013	4:58:21 PM	PH3 valve closed
2/5/2013	4:58:21 PM	SiCl4 pre valve closed
2/5/2013	4:58:21 PM	SiCl4 post valve closed
2/5/2013	4:58:21 PM	Main Vac valve closed
2/5/2013	4:58:21 PM	Bypass valve closed
2/5/2013	4:58:21 PM	H2 valve opened
2/5/2013	4:58:21 PM	Bubbler valve opened
2/5/2013	4:58:21 PM	Helium MFC set to  0.000000
2/5/2013	4:58:21 PM	H2 MFC set to  500.000000
2/5/2013	4:58:21 PM	BCl3 MFC set to  0.000000
2/5/2013	4:58:21 PM	PH3 MFC set to  0.000000
2/5/2013	4:58:21 PM	SiCl4 MFC set to  0.000000
2/5/2013	4:58:21 PM	Bypass solenoid MFC set to  0.000000
2/5/2013	4:58:21 PM	Tube furnace set to 850
2/5/2013	5:00:21 PM	H2 valve closed
2/5/2013	5:00:21 PM	BCl3 valve closed
2/5/2013	5:00:21 PM	PH3 valve closed
2/5/2013	5:00:21 PM	SiCl4 pre valve closed
2/5/2013	5:00:21 PM	SiCl4 post valve closed
2/5/2013	5:00:21 PM	Main Vac valve closed
2/5/2013	5:00:21 PM	Bypass valve closed
2/5/2013	5:00:21 PM	Helium valve opened
2/5/2013	5:00:21 PM	Bubbler valve opened
2/5/2013	5:00:21 PM	Helium MFC set to  500.000000
2/5/2013	5:00:21 PM	H2 MFC set to  0.000000
2/5/2013	5:00:21 PM	BCl3 MFC set to  0.000000
2/5/2013	5:00:21 PM	PH3 MFC set to  0.000000
2/5/2013	5:00:21 PM	SiCl4 MFC set to  0.000000
2/5/2013	5:00:21 PM	Bypass solenoid MFC set to  0.000000
2/5/2013	5:00:21 PM	Tube furnace set to 800
2/5/2013	5:02:21 PM	H2 valve closed
2/5/2013	5:02:21 PM	BCl3 valve closed
2/5/2013	5:02:21 PM	PH3 valve closed
2/5/2013	5:02:21 PM	SiCl4 pre valve closed
2/5/2013	5:02:21 PM	SiCl4 post valve closed
2/5/2013	5:02:21 PM	Main Vac valve closed
2/5/2013	5:02:21 PM	Bypass valve closed
2/5/2013	5:02:21 PM	Helium valve opened
2/5/2013	5:02:21 PM	Bubbler valve opened
2/5/2013	5:02:21 PM	Helium MFC set to  500.000000
2/5/2013	5:02:21 PM	H2 MFC set to  0.000000
2/5/2013	5:02:21 PM	BCl3 MFC set to  0.000000
2/5/2013	5:02:21 PM	PH3 MFC set to  0.000000
2/5/2013	5:02:21 PM	SiCl4 MFC set to  0.000000
2/5/2013	5:02:21 PM	Bypass solenoid MFC set to  0.000000
2/5/2013	5:02:21 PM	Tube furnace set to 750
2/5/2013	5:04:21 PM	H2 valve closed
2/5/2013	5:04:21 PM	BCl3 valve closed
2/5/2013	5:04:21 PM	PH3 valve closed
2/5/2013	5:04:21 PM	SiCl4 pre valve closed
2/5/2013	5:04:21 PM	SiCl4 post valve closed
2/5/2013	5:04:21 PM	Main Vac valve closed
2/5/2013	5:04:21 PM	Bypass valve closed
2/5/2013	5:04:21 PM	Helium valve opened
2/5/2013	5:04:21 PM	Bubbler valve opened
2/5/2013	5:04:21 PM	Helium MFC set to  500.000000
2/5/2013	5:04:21 PM	H2 MFC set to  0.000000
2/5/2013	5:04:21 PM	BCl3 MFC set to  0.000000
2/5/2013	5:04:21 PM	PH3 MFC set to  0.000000
2/5/2013	5:04:21 PM	SiCl4 MFC set to  0.000000
2/5/2013	5:04:21 PM	Bypass solenoid MFC set to  0.000000
2/5/2013	5:04:21 PM	Tube furnace set to 0
2/5/2013	5:24:21 PM	Helium valve closed
2/5/2013	5:24:21 PM	H2 valve closed
2/5/2013	5:24:21 PM	BCl3 valve closed
2/5/2013	5:24:21 PM	PH3 valve closed
2/5/2013	5:24:21 PM	SiCl4 pre valve closed
2/5/2013	5:24:21 PM	SiCl4 post valve closed
2/5/2013	5:24:21 PM	Main Vac valve closed
2/5/2013	5:24:21 PM	Bypass valve closed
2/5/2013	5:24:21 PM	Bubbler valve closed
2/5/2013	5:24:21 PM	Helium MFC set to  0.000000
2/5/2013	5:24:21 PM	H2 MFC set to  0.000000
2/5/2013	5:24:21 PM	BCl3 MFC set to  0.000000
2/5/2013	5:24:21 PM	PH3 MFC set to  0.000000
2/5/2013	5:24:21 PM	SiCl4 MFC set to  0.000000
2/5/2013	5:24:21 PM	Bypass solenoid MFC set to  0.000000
2/5/2013	5:24:22 PM	Tube furnace set to 0
2/5/2013	5:24:23 PM	Helium valve closed
2/5/2013	5:24:23 PM	H2 valve closed
2/5/2013	5:24:23 PM	BCl3 valve closed
2/5/2013	5:24:23 PM	PH3 valve closed
2/5/2013	5:24:23 PM	SiCl4 pre valve closed
2/5/2013	5:24:23 PM	SiCl4 post valve closed
2/5/2013	5:24:23 PM	Main Vac valve closed
2/5/2013	5:24:23 PM	Bubbler valve closed
2/5/2013	5:24:23 PM	Bypass valve opened
2/5/2013	5:24:23 PM	Helium MFC set to  0.000000
2/5/2013	5:24:23 PM	H2 MFC set to  0.000000
2/5/2013	5:24:23 PM	BCl3 MFC set to  0.000000
2/5/2013	5:24:23 PM	PH3 MFC set to  0.000000
2/5/2013	5:24:23 PM	SiCl4 MFC set to  0.000000
2/5/2013	5:24:23 PM	Bypass solenoid MFC set to  0.000000
2/5/2013	5:24:23 PM	Tube furnace set to 0
2/5/2013	5:25:21 PM	Helium valve closed
2/5/2013	5:25:21 PM	H2 valve closed
2/5/2013	5:25:21 PM	BCl3 valve closed
2/5/2013	5:25:21 PM	PH3 valve closed
2/5/2013	5:25:21 PM	SiCl4 pre valve closed
2/5/2013	5:25:21 PM	SiCl4 post valve closed
2/5/2013	5:25:21 PM	Main Vac valve closed
2/5/2013	5:25:21 PM	Bubbler valve closed
2/5/2013	5:25:21 PM	Bypass valve opened
2/5/2013	5:25:21 PM	Helium MFC set to  0.000000
2/5/2013	5:25:21 PM	H2 MFC set to  0.000000
2/5/2013	5:25:21 PM	BCl3 MFC set to  0.000000
2/5/2013	5:25:21 PM	PH3 MFC set to  0.000000
2/5/2013	5:25:21 PM	SiCl4 MFC set to  0.000000
2/5/2013	5:25:21 PM	Bypass solenoid MFC set to  0.000000
2/5/2013	5:25:21 PM	Tube furnace set to 0
2/5/2013	5:26:21 PM	Helium valve closed
2/5/2013	5:26:21 PM	H2 valve closed
2/5/2013	5:26:21 PM	BCl3 valve closed
2/5/2013	5:26:21 PM	PH3 valve closed
2/5/2013	5:26:21 PM	SiCl4 pre valve closed
2/5/2013	5:26:21 PM	SiCl4 post valve closed
2/5/2013	5:26:21 PM	Bypass valve closed
2/5/2013	5:26:21 PM	Bubbler valve closed
2/5/2013	5:26:21 PM	Main Vac valve opened
2/5/2013	5:26:21 PM	Helium MFC set to  0.000000
2/5/2013	5:26:21 PM	H2 MFC set to  0.000000
2/5/2013	5:26:21 PM	BCl3 MFC set to  0.000000
2/5/2013	5:26:21 PM	PH3 MFC set to  0.000000
2/5/2013	5:26:21 PM	SiCl4 MFC set to  0.000000
2/5/2013	5:26:21 PM	Bypass solenoid MFC set to  0.000000
2/5/2013	5:26:22 PM	Tube furnace set to 0
2/5/2013	5:26:23 PM	Run finished at 5:26 PM
2/5/2013	5:55:33 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/5/2013	5:55:34 PM	Recipe started at 5:55 PM
2/5/2013	5:55:34 PM	Helium valve closed
2/5/2013	5:55:34 PM	H2 valve closed
2/5/2013	5:55:34 PM	BCl3 valve closed
2/5/2013	5:55:34 PM	PH3 valve closed
2/5/2013	5:55:34 PM	SiCl4 pre valve closed
2/5/2013	5:55:34 PM	SiCl4 post valve closed
2/5/2013	5:55:34 PM	Main Vac valve closed
2/5/2013	5:55:34 PM	Bypass valve closed
2/5/2013	5:55:34 PM	Bubbler valve closed
2/5/2013	5:55:34 PM	Helium MFC set to  0.000000
2/5/2013	5:55:34 PM	H2 MFC set to  0.000000
2/5/2013	5:55:34 PM	BCl3 MFC set to  0.000000
2/5/2013	5:55:34 PM	PH3 MFC set to  0.000000
2/5/2013	5:55:34 PM	SiCl4 MFC set to  0.000000
2/5/2013	5:55:34 PM	Bypass solenoid MFC set to  0.000000
2/5/2013	5:55:34 PM	Tube furnace set to 0
2/5/2013	5:55:37 PM	H2 valve closed
2/5/2013	5:55:37 PM	BCl3 valve closed
2/5/2013	5:55:37 PM	PH3 valve closed
2/5/2013	5:55:37 PM	SiCl4 pre valve closed
2/5/2013	5:55:37 PM	SiCl4 post valve closed
2/5/2013	5:55:37 PM	Main Vac valve closed
2/5/2013	5:55:37 PM	Bypass valve closed
2/5/2013	5:55:37 PM	Bubbler valve closed
2/5/2013	5:55:37 PM	Helium valve opened
2/5/2013	5:55:37 PM	Helium MFC set to  500.000000
2/5/2013	5:55:37 PM	H2 MFC set to  0.000000
2/5/2013	5:55:37 PM	BCl3 MFC set to  0.000000
2/5/2013	5:55:37 PM	PH3 MFC set to  0.000000
2/5/2013	5:55:37 PM	SiCl4 MFC set to  0.000000
2/5/2013	5:55:37 PM	Bypass solenoid MFC set to  0.000000
2/5/2013	5:55:37 PM	Tube furnace set to 0
2/5/2013	5:56:48 PM	Helium valve closed
2/5/2013	5:56:48 PM	H2 valve closed
2/5/2013	5:56:48 PM	BCl3 valve closed
2/5/2013	5:56:48 PM	PH3 valve closed
2/5/2013	5:56:48 PM	SiCl4 pre valve closed
2/5/2013	5:56:48 PM	SiCl4 post valve closed
2/5/2013	5:56:48 PM	Main Vac valve closed
2/5/2013	5:56:48 PM	Bypass valve closed
2/5/2013	5:56:48 PM	Bubbler valve closed
2/5/2013	5:56:48 PM	Helium MFC set to  0.000000
2/5/2013	5:56:48 PM	H2 MFC set to  0.000000
2/5/2013	5:56:48 PM	BCl3 MFC set to  0.000000
2/5/2013	5:56:48 PM	PH3 MFC set to  0.000000
2/5/2013	5:56:48 PM	SiCl4 MFC set to  0.000000
2/5/2013	5:56:48 PM	Bypass solenoid MFC set to  0.000000
2/5/2013	5:56:48 PM	Tube furnace set to 0
2/5/2013	5:56:49 PM	Run finished at 5:56 PM
2/5/2013	5:56:49 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/5/2013	6:01:12 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/5/2013	6:01:12 PM	Recipe started at 6:01 PM
2/5/2013	6:01:12 PM	Helium valve closed
2/5/2013	6:01:12 PM	H2 valve closed
2/5/2013	6:01:12 PM	BCl3 valve closed
2/5/2013	6:01:12 PM	PH3 valve closed
2/5/2013	6:01:12 PM	SiCl4 pre valve closed
2/5/2013	6:01:12 PM	SiCl4 post valve closed
2/5/2013	6:01:12 PM	Main Vac valve closed
2/5/2013	6:01:12 PM	Bubbler valve closed
2/5/2013	6:01:12 PM	Bypass valve opened
2/5/2013	6:01:12 PM	Helium MFC set to  0.000000
2/5/2013	6:01:12 PM	H2 MFC set to  0.000000
2/5/2013	6:01:12 PM	BCl3 MFC set to  0.000000
2/5/2013	6:01:12 PM	PH3 MFC set to  0.000000
2/5/2013	6:01:12 PM	SiCl4 MFC set to  0.000000
2/5/2013	6:01:12 PM	Bypass solenoid MFC set to  0.000000
2/5/2013	6:01:12 PM	Tube furnace set to 0
2/5/2013	6:02:33 PM	Helium valve closed
2/5/2013	6:02:33 PM	H2 valve closed
2/5/2013	6:02:33 PM	BCl3 valve closed
2/5/2013	6:02:33 PM	PH3 valve closed
2/5/2013	6:02:33 PM	SiCl4 pre valve closed
2/5/2013	6:02:33 PM	SiCl4 post valve closed
2/5/2013	6:02:33 PM	Main Vac valve closed
2/5/2013	6:02:33 PM	Bubbler valve closed
2/5/2013	6:02:33 PM	Bypass valve opened
2/5/2013	6:02:33 PM	Helium MFC set to  0.000000
2/5/2013	6:02:33 PM	H2 MFC set to  0.000000
2/5/2013	6:02:33 PM	BCl3 MFC set to  0.000000
2/5/2013	6:02:33 PM	PH3 MFC set to  0.000000
2/5/2013	6:02:33 PM	SiCl4 MFC set to  0.000000
2/5/2013	6:02:33 PM	Bypass solenoid MFC set to  0.000000
2/5/2013	6:02:33 PM	Tube furnace set to 0
2/5/2013	6:03:33 PM	Helium valve closed
2/5/2013	6:03:33 PM	H2 valve closed
2/5/2013	6:03:33 PM	BCl3 valve closed
2/5/2013	6:03:33 PM	PH3 valve closed
2/5/2013	6:03:33 PM	SiCl4 pre valve closed
2/5/2013	6:03:33 PM	SiCl4 post valve closed
2/5/2013	6:03:33 PM	Bypass valve closed
2/5/2013	6:03:33 PM	Bubbler valve closed
2/5/2013	6:03:33 PM	Main Vac valve opened
2/5/2013	6:03:33 PM	Helium MFC set to  0.000000
2/5/2013	6:03:33 PM	H2 MFC set to  0.000000
2/5/2013	6:03:33 PM	BCl3 MFC set to  0.000000
2/5/2013	6:03:33 PM	PH3 MFC set to  0.000000
2/5/2013	6:03:33 PM	SiCl4 MFC set to  0.000000
2/5/2013	6:03:33 PM	Bypass solenoid MFC set to  0.000000
2/5/2013	6:03:33 PM	Tube furnace set to 0
2/5/2013	6:03:34 PM	Run finished at 6:03 PM
2/5/2013	6:03:34 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/5/2013	6:10:18 PM	Recipe started at 6:10 PM
2/5/2013	6:10:19 PM	Helium valve closed
2/5/2013	6:10:19 PM	H2 valve closed
2/5/2013	6:10:19 PM	BCl3 valve closed
2/5/2013	6:10:19 PM	PH3 valve closed
2/5/2013	6:10:19 PM	SiCl4 pre valve closed
2/5/2013	6:10:19 PM	SiCl4 post valve closed
2/5/2013	6:10:19 PM	Bypass valve closed
2/5/2013	6:10:19 PM	Bubbler valve closed
2/5/2013	6:10:19 PM	Main Vac valve opened
2/5/2013	6:10:19 PM	Helium MFC set to  0.000000
2/5/2013	6:10:19 PM	H2 MFC set to  0.000000
2/5/2013	6:10:19 PM	BCl3 MFC set to  0.000000
2/5/2013	6:10:19 PM	PH3 MFC set to  0.000000
2/5/2013	6:10:19 PM	SiCl4 MFC set to  0.000000
2/5/2013	6:10:19 PM	Bypass solenoid MFC set to  0.000000
2/5/2013	6:10:19 PM	Tube furnace set to 0
